Paper Abstract and Keywords |
Presentation |
2016-11-17 16:30
[Poster Presentation]
Light shielding Al alloy film for image sensor. Yoko Shida, Hiroshi Goto, Mototaka Ochi (KSL), Hiroyuki Okuno, Moriyoshi Kanamaru (KOBELCO RESEARCH INSTITUTE, INC) |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
We have developed new aluminum alloy films for a light-shielding metal layer in image sensors. Unlike conventional tungsten films, which are widely used for light shielding in image sensor but easily peel off due to their high membrane stress of the film, the proposed aluminum alloy films have lesser membrane stress and show good adhesion properties as well as good thermal resistance. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Light-shielding fulm / Al alloy / / / / / / |
Reference Info. |
ITE Tech. Rep., vol. 40, no. 40, IST2016-59, pp. 23-24, Nov. 2016. |
Paper # |
IST2016-59 |
Date of Issue |
2016-11-10 (IST) |
ISSN |
Print edition: ISSN 1342-6893 Online edition: ISSN 2424-1970 |
Download PDF |
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Conference Information |
Committee |
IST |
Conference Date |
2016-11-17 - 2016-11-17 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
TITECH Tamachi Campus |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Open Poster Session of 3rd International Workshop on Image Sensors and Imaging Systems (IWISS2016) |
Paper Information |
Registration To |
IST |
Conference Code |
2016-11-IST |
Language |
English (Japanese title is available) |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Light shielding Al alloy film for image sensor. |
Sub Title (in English) |
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Keyword(1) |
Light-shielding fulm |
Keyword(2) |
Al alloy |
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1st Author's Name |
Yoko Shida |
1st Author's Affiliation |
KOBE STEEL, LTD. (KSL) |
2nd Author's Name |
Hiroshi Goto |
2nd Author's Affiliation |
KOBE STEEL, LTD. (KSL) |
3rd Author's Name |
Mototaka Ochi |
3rd Author's Affiliation |
KOBE STEEL, LTD. (KSL) |
4th Author's Name |
Hiroyuki Okuno |
4th Author's Affiliation |
KOBELCO RESEARCH INSTITUTE, INC (KOBELCO RESEARCH INSTITUTE, INC) |
5th Author's Name |
Moriyoshi Kanamaru |
5th Author's Affiliation |
KOBELCO RESEARCH INSTITUTE, INC (KOBELCO RESEARCH INSTITUTE, INC) |
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Speaker |
Author-1 |
Date Time |
2016-11-17 16:30:00 |
Presentation Time |
90 minutes |
Registration for |
IST |
Paper # |
IST2016-59 |
Volume (vol) |
vol.40 |
Number (no) |
no.40 |
Page |
pp.23-24 |
#Pages |
2 |
Date of Issue |
2016-11-10 (IST) |
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