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| Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
| IST |
2021-10-21
10:50 |
Online |
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High-precision CMOS Proximity Capacitance Image Sensors with Large-format 12 µm and High-resolution 2.8 µm Pixels
Yuki Sugama, Yoshiaki Watanabe, Rihito Kuroda, Masahiro Yamamoto, Tetsuya Goto (Tohoku Univ.), Toshiro Yasuda, Shinichi Murakami, Hiroshi Hamori (OHT), Naoya Kuriyama (LAPIS Semiconductor), Shigetoshi Sugawa (Tohoku Univ.) |
This paper presents newly developed two high-precision CMOS proximity capacitance image sensors: Chip A with 12 µm pitch... [more] |
IST2021-51
pp.13-16 |
| IST |
2019-03-22
15:35 |
Tokyo |
Kikai-Shinko-Kaikan Bldg. |
A CMOS Proximity Capacitance Image Sensor with 0.1aF Detection Accuracy
Masahiro Yamamoto, Rihito Kuroda, Manabu Suzuki, Tetsuya Goto (Tohoku Univ.), Hiroshi Hamori, Shinichi Murakami, Toshiro Yasuda, Yayoi Yokomichi (OHT Inc.), Shigetoshi Sugawa (Tohoku Univ.) |
[more] |
IST2019-21
pp.49-54 |
| IDY |
2013-03-15
13:05 |
Tokyo |
Kikai-Shinko-Kaikan Bldg. |
[Invited Talk]
A Fast Non-Contact Inspection Method through Phased Array Systems for High Resolution Flat Panel Pattern
Hiroshi Hamori (OHT), Hideki Katagiri (Hiroshima Univ.), Kosuke Kato (HIT) |
The quality of images on flat panels has been improving remarkably in recent years and as a result ultra high definition... [more] |
IDY2013-16
pp.1-6 |
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