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All Technical Committee Conferences (Searched in: All Years)
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| Search Results: Conference Papers |
| Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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| Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
| IDY, IEICE-EID, IEIJ-SSL, SID-JC, IEE-EDD [detail] |
2020-01-23
15:15 |
Tottori |
Tottori Univ |
[Invited Lecture]
Surface Treatment using Atomic Hydrogen for Semiconductor Process
Akira Heya (Univ. of Hyogo) |
To realize flexible displays and sheet computers, we have tried to develop the novel surface treatment, named Atomic Hyd... [more] |
IDY2020-13
pp.67-72 |
| IEICE-EID, IEICE-SDM, IDY [detail] |
2018-12-25
13:30 |
Kyoto |
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Effect of atomic hydrogen annealing on AlOx/GeOx/a-Ge stack structure fabricated in O2 ambient
Tomofumi Onuki, Akira Heya, Naoto Matsuo (Univ. Hyogo) |
[more] |
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| IEICE-EID, IEICE-SDM, IDY [detail] |
2018-12-25
13:45 |
Kyoto |
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Effect of Ar-cluster irradiation on DNA/Si-MOSFET
Hibiki Nakano, Naoto Mastuo, Akira Heya, Kazushige Yamana, Tadao Takada, Kousuke Moritani, Norio Inui, Yu Sato (Univ. Hyogo), Tadashi Sato, Shin Yokoyama (Hiroshima Univ.) |
[more] |
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