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Committee Date Time Place Paper Title / Authors Abstract Paper #
IST 2023-09-15
Tokyo Kikai-Shinko-Kaikan Bldg.
(Primary: On-site, Secondary: Online)
A 3.06 μm SPAD Pixel with Embedded Metal Contact and Power Grid on Deep Trench Pixel Isolation for High-resolution Photon-counting
Tatsuya Nakata, Jun Ogi, Fumiaki Sano, Yoshiki Kubo, Wataru Onishi, Charith Koswaththaghe, Takeya Mochizuki, Yoshiaki Tashiro, Kazuki Hizu, Takafumi Takatsuka, Fumihiko Koga, Tomoyuki Hirano, Yusuke Oike (SSS)
This paper presents a 3.06-μm-pitch SPAD pixel with the embedded metal contact and power grid on two-step deep trench is... [more] IST2023-44
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