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IST
2021-10-21
10:50
Online
High-precision CMOS Proximity Capacitance Image Sensors with Large-format 12 µm and High-resolution 2.8 µm Pixels
Yuki Sugama
,
Yoshiaki Watanabe
,
Rihito Kuroda
,
Masahiro Yamamoto
,
Tetsuya Goto
(
Tohoku Univ.
),
Toshiro Yasuda
,
Shinichi Murakami
,
Hiroshi Hamori
(
OHT
),
Naoya Kuriyama
(
LAPIS Semiconductor
),
Shigetoshi Sugawa
(
Tohoku Univ.
)
This paper presents newly developed two high-precision CMOS proximity capacitance image sensors: Chip A with 12 µm pitch...
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IST2021-51
pp.13-16
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