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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
 Results 1 - 3 of 3  /   
Committee Date Time Place Paper Title / Authors Abstract Paper #
IDY, IEICE-EID, IEIJ-SSL, SID-JC, IEE-EDD [detail] 2020-01-23
15:15
Tottori Tottori Univ [Invited Lecture] Surface Treatment using Atomic Hydrogen for Semiconductor Process
Akira Heya (Univ. of Hyogo)
To realize flexible displays and sheet computers, we have tried to develop the novel surface treatment, named Atomic Hyd... [more] IDY2020-13
pp.67-72
IEICE-EID, IEICE-SDM, IDY [detail] 2018-12-25
13:30
Kyoto   Effect of atomic hydrogen annealing on AlOx/GeOx/a-Ge stack structure fabricated in O2 ambient
Tomofumi Onuki, Akira Heya, Naoto Matsuo (Univ. Hyogo)
 [more]
IEICE-EID, IEICE-SDM, IDY [detail] 2018-12-25
13:45
Kyoto   Effect of Ar-cluster irradiation on DNA/Si-MOSFET
Hibiki Nakano, Naoto Mastuo, Akira Heya, Kazushige Yamana, Tadao Takada, Kousuke Moritani, Norio Inui, Yu Sato (Univ. Hyogo), Tadashi Sato, Shin Yokoyama (Hiroshima Univ.)
 [more]
 Results 1 - 3 of 3  /   
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