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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
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Committee Date Time Place Paper Title / Authors Abstract Paper #
IDY, IEICE-EID, IEIJ-SSL, SID-JC, IEE-EDD [detail] 2020-01-23
15:15
Tottori Tottori Univ [Invited Lecture] Surface Treatment using Atomic Hydrogen for Semiconductor Process
Akira Heya (Univ. of Hyogo)
To realize flexible displays and sheet computers, we have tried to develop the novel surface treatment, named Atomic Hyd... [more] IDY2020-13
pp.67-72
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