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Presentation 2010-12-10 10:45
Fundamental study of crystal orientation control by collimated sputtering
Naoki Honda, Akito Honda (Tohoku Inst. Tech.)
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Conference Information
Committee MMS IEICE-MRIS  
Conference Date 2010-12-09 - 2010-12-10 
Place (in Japanese) (See Japanese page) 
Place (in English) Ehime Univ. 
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Paper Information
Registration To IEICE-MRIS 
Conference Code 2010-12-MMS-MR 
Language Japanese 
Title (in Japanese) (See Japanese page) 
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Title (in English) Fundamental study of crystal orientation control by collimated sputtering 
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1st Author's Name Naoki Honda  
1st Author's Affiliation Tohoku Institute of Technology (Tohoku Inst. Tech.)
2nd Author's Name Akito Honda  
2nd Author's Affiliation Tohoku Institute of Technology (Tohoku Inst. Tech.)
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Date Time 2010-12-10 10:45:00 
Presentation Time 30 minutes 
Registration for IEICE-MRIS 
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Volume (vol) vol.34 
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