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Paper Abstract and Keywords
Presentation 2011-01-28 14:45
3D SEM Measurement of Micro-Optical-Element Shape by Nanoparticle Scattering
Takayuki Chonan, Baku Katagiri, Tohru Kawakami (Tohoku Univ.), Tatsuo Uchida (SNCT)
Abstract (in Japanese) (See Japanese page) 
(in English) Optical elements for display are required more complex control of the incident light, therefore measurements and evaluations of three-dimensional surface shape become more important. However conventional measurement methods of the surface shape can’t measure samples with very flat surface or steep slope accurately. In this study, we try to measure three-dimensional shape with SEM more accurately by making fine pattern with scattering nanoparticles. As a result, we show the relation between the magnification of the nanoparticles and the accuracy of the measurement, and confirm the validity of the measurement.
Keyword (in Japanese) (See Japanese page) 
(in English) microscopic optical element / 3D shape measurement / SEM / nanoparticle / / / /  
Reference Info. ITE Tech. Rep., vol. 35, no. 4, IDY2011-4, pp. 49-52, Jan. 2011.
Paper # IDY2011-4 
Date of Issue 2011-01-21 (IDY) 
ISSN Print edition: ISSN 1342-6893
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Conference Information
Conference Date 2011-01-28 - 2011-01-29 
Place (in Japanese) (See Japanese page) 
Place (in English) Kochi University of Technology 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Emissive/Non-Emissive Displays 
Paper Information
Registration To IDY 
Conference Code 2011-01-IDY-EID-EDD-OMD-JC 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) 3D SEM Measurement of Micro-Optical-Element Shape by Nanoparticle Scattering 
Sub Title (in English)  
Keyword(1) microscopic optical element  
Keyword(2) 3D shape measurement  
Keyword(3) SEM  
Keyword(4) nanoparticle  
1st Author's Name Takayuki Chonan  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
2nd Author's Name Baku Katagiri  
2nd Author's Affiliation Tohoku University (Tohoku Univ.)
3rd Author's Name Tohru Kawakami  
3rd Author's Affiliation Tohoku University (Tohoku Univ.)
4th Author's Name Tatsuo Uchida  
4th Author's Affiliation Sendai National College of Technology (SNCT)
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Speaker Author-1 
Date Time 2011-01-28 14:45:00 
Presentation Time 10 minutes 
Registration for IDY 
Paper # IDY2011-4 
Volume (vol) vol.35 
Number (no) no.4 
Page pp.49-52 
Date of Issue 2011-01-21 (IDY) 

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