| Paper Abstract and Keywords |
| Presentation |
2011-01-28 14:45
3D SEM Measurement of Micro-Optical-Element Shape by Nanoparticle Scattering
Takayuki Chonan, Baku Katagiri, Tohru Kawakami (Tohoku Univ.), Tatsuo Uchida (SNCT) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
Optical elements for display are required more complex control of the incident light, therefore measurements and evaluations of three-dimensional surface shape become more important. However conventional measurement methods of the surface shape can’t measure samples with very flat surface or steep slope accurately. In this study, we try to measure three-dimensional shape with SEM more accurately by making fine pattern with scattering nanoparticles. As a result, we show the relation between the magnification of the nanoparticles and the accuracy of the measurement, and confirm the validity of the measurement. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
microscopic optical element / 3D shape measurement / SEM / nanoparticle / / / / |
| Reference Info. |
ITE Tech. Rep., vol. 35, no. 4, IDY2011-4, pp. 49-52, Jan. 2011. |
| Paper # |
IDY2011-4 |
| Date of Issue |
2011-01-21 (IDY) |
| ISSN |
Print edition: ISSN 1342-6893 |
| Download PDF |
|
| Conference Information |
| Committee |
IDY IEICE-EID IEE-EDD IEIJ-OMD |
| Conference Date |
2011-01-28 - 2011-01-29 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Kochi University of Technology |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Emissive/Non-Emissive Displays |
| Paper Information |
| Registration To |
IDY |
| Conference Code |
2011-01-IDY-EID-EDD-OMD-JC |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
3D SEM Measurement of Micro-Optical-Element Shape by Nanoparticle Scattering |
| Sub Title (in English) |
|
| Keyword(1) |
microscopic optical element |
| Keyword(2) |
3D shape measurement |
| Keyword(3) |
SEM |
| Keyword(4) |
nanoparticle |
| Keyword(5) |
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| Keyword(6) |
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| 1st Author's Name |
Takayuki Chonan |
| 1st Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 2nd Author's Name |
Baku Katagiri |
| 2nd Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 3rd Author's Name |
Tohru Kawakami |
| 3rd Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 4th Author's Name |
Tatsuo Uchida |
| 4th Author's Affiliation |
Sendai National College of Technology (SNCT) |
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| Speaker |
Author-1 |
| Date Time |
2011-01-28 14:45:00 |
| Presentation Time |
10 minutes |
| Registration for |
IDY |
| Paper # |
IDY2011-4 |
| Volume (vol) |
vol.35 |
| Number (no) |
no.4 |
| Page |
pp.49-52 |
| #Pages |
4 |
| Date of Issue |
2011-01-21 (IDY) |