A 1mm-pitch 80x80-channel 322Hz-frame-rate capacitive touch sensor has been developed. Multiple touch points are detected by a two-step dual-mode capacitance scan to reduce a scan time increased in the high resolution. Row-and-column dedicated parallel ADCs further reduce the scan time. A time-domain counter-based slope ADC suppresses power and area penalty in the parallel ADC. A signal attenuation due to a sensor capacitance reduction in the high resolution is compensated by thorough noise-reduction techniques in the sensor analog frontend. A prototype in 0.35um CMOS demonstrates 41dB SNR with >3x higher pitch resolution, >10x faster touch-point scan, 12x and 4x higher energy and area efficiency to the-state-of-the-art touch sensors.