ITE Technical Group Submission System
Conference Paper's Information
Online Proceedings
[Sign in]
 Go Top Page Go Previous   [Japanese] / [English] 

Paper Abstract and Keywords
Presentation 2018-08-07 12:55
[Invited Talk] Development of SiGe-MEMS-on-CMOS technology for ultra-low-power inertial sensors
Hideyuki Tomizawa, Yoshihiko Kurui (Toshiba), Ippei Akita (AIST), Akira Fujimoto, Tomohiro Saito, Akihiro Kojima, Hideki Shibata (Toshiba)
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
Keyword (in Japanese) (See Japanese page) 
(in English) / / / / / / /  
Reference Info. ITE Tech. Rep.
Paper #  
Date of Issue  
ISSN Print edition: ISSN 1342-6893  Online edition: ISSN 2424-1970
Download PDF

Conference Information
Committee IST IEICE-ICD IEICE-SDM  
Conference Date 2018-08-07 - 2018-08-09 
Place (in Japanese) (See Japanese page) 
Place (in English) Hokkaido University M Bldg. M151 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To IEICE-SDM 
Conference Code 2018-08-SDM-ICD-IST 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Development of SiGe-MEMS-on-CMOS technology for ultra-low-power inertial sensors 
Sub Title (in English)  
Keyword(1)  
Keyword(2)  
Keyword(3)  
Keyword(4)  
Keyword(5)  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Hideyuki Tomizawa  
1st Author's Affiliation Toshiba Corporation (Toshiba)
2nd Author's Name Yoshihiko Kurui  
2nd Author's Affiliation Toshiba Corporation (Toshiba)
3rd Author's Name Ippei Akita  
3rd Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
4th Author's Name Akira Fujimoto  
4th Author's Affiliation Toshiba Corporation (Toshiba)
5th Author's Name Tomohiro Saito  
5th Author's Affiliation Toshiba Corporation (Toshiba)
6th Author's Name Akihiro Kojima  
6th Author's Affiliation Toshiba Corporation (Toshiba)
7th Author's Name Hideki Shibata  
7th Author's Affiliation Toshiba Corporation (Toshiba)
8th Author's Name  
8th Author's Affiliation ()
9th Author's Name  
9th Author's Affiliation ()
10th Author's Name  
10th Author's Affiliation ()
11th Author's Name  
11th Author's Affiliation ()
12th Author's Name  
12th Author's Affiliation ()
13th Author's Name  
13th Author's Affiliation ()
14th Author's Name  
14th Author's Affiliation ()
15th Author's Name  
15th Author's Affiliation ()
16th Author's Name  
16th Author's Affiliation ()
17th Author's Name  
17th Author's Affiliation ()
18th Author's Name  
18th Author's Affiliation ()
19th Author's Name  
19th Author's Affiliation ()
20th Author's Name  
20th Author's Affiliation ()
Speaker
Date Time 2018-08-07 12:55:00 
Presentation Time 45 
Registration for IEICE-SDM 
Paper #  
Volume (vol) ITE-42 
Number (no)  
Page  
#Pages ITE- 
Date of Issue  


[Return to Top Page]

[Return to ITE Web Page]


The Institute of Image Information and Television Engineers (ITE), Japan