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Paper Abstract and Keywords
Presentation 2019-08-02 15:10
[Invited Lecture] Development of G6 Exposure Tool for 1.2 μm Resolution
Kouhei Nagano, Nobuhiko Yabu, Manabu Hakko, Miwako Ando, Nozomu Izumi, Yoshinori Osaki (Canon)
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
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Reference Info. ITE Tech. Rep., vol. 43, no. 24, IDY2019-45, pp. 17-20, Aug. 2019.
Paper # IDY2019-45 
Date of Issue 2019-07-26 (IDY) 
ISSN Print edition: ISSN 1342-6893  Online edition: ISSN 2424-1970
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Conference Information
Conference Date 2019-08-02 - 2019-08-02 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Information Display 
Paper Information
Registration To IDY 
Conference Code 2019-08-IDY-EID-JC 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Development of G6 Exposure Tool for 1.2 μm Resolution 
Sub Title (in English)  
1st Author's Name Kouhei Nagano  
1st Author's Affiliation Canon Inc. (Canon)
2nd Author's Name Nobuhiko Yabu  
2nd Author's Affiliation Canon Inc. (Canon)
3rd Author's Name Manabu Hakko  
3rd Author's Affiliation Canon Inc. (Canon)
4th Author's Name Miwako Ando  
4th Author's Affiliation Canon Inc. (Canon)
5th Author's Name Nozomu Izumi  
5th Author's Affiliation Canon Inc. (Canon)
6th Author's Name Yoshinori Osaki  
6th Author's Affiliation Canon Inc. (Canon)
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Date Time 2019-08-02 15:10:00 
Presentation Time 25 
Registration for IDY 
Paper # ITE-IDY2019-45 
Volume (vol) ITE-43 
Number (no) no.24 
Page pp.17-20 
#Pages ITE-4 
Date of Issue ITE-IDY-2019-07-26 

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