| Paper Abstract and Keywords |
| Presentation |
2019-08-02 15:10
[Invited Lecture]
Development of G6 Exposure Tool for 1.2 μm Resolution
Kouhei Nagano, Nobuhiko Yabu, Manabu Hakko, Miwako Ando, Nozomu Izumi, Yoshinori Osaki (Canon) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
(Not available yet) |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
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| Reference Info. |
ITE Tech. Rep., vol. 43, no. 24, IDY2019-45, pp. 17-20, Aug. 2019. |
| Paper # |
IDY2019-45 |
| Date of Issue |
2019-07-26 (IDY) |
| ISSN |
Print edition: ISSN 1342-6893 Online edition: ISSN 2424-1970 |
| Download PDF |
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| Conference Information |
| Committee |
IDY IEICE-EID SID-JC |
| Conference Date |
2019-08-02 - 2019-08-02 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Information Display |
| Paper Information |
| Registration To |
IDY |
| Conference Code |
2019-08-IDY-EID-JC |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Development of G6 Exposure Tool for 1.2 μm Resolution |
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| 1st Author's Name |
Kouhei Nagano |
| 1st Author's Affiliation |
Canon Inc. (Canon) |
| 2nd Author's Name |
Nobuhiko Yabu |
| 2nd Author's Affiliation |
Canon Inc. (Canon) |
| 3rd Author's Name |
Manabu Hakko |
| 3rd Author's Affiliation |
Canon Inc. (Canon) |
| 4th Author's Name |
Miwako Ando |
| 4th Author's Affiliation |
Canon Inc. (Canon) |
| 5th Author's Name |
Nozomu Izumi |
| 5th Author's Affiliation |
Canon Inc. (Canon) |
| 6th Author's Name |
Yoshinori Osaki |
| 6th Author's Affiliation |
Canon Inc. (Canon) |
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| Speaker |
Author-1 |
| Date Time |
2019-08-02 15:10:00 |
| Presentation Time |
25 minutes |
| Registration for |
IDY |
| Paper # |
IDY2019-45 |
| Volume (vol) |
vol.43 |
| Number (no) |
no.24 |
| Page |
pp.17-20 |
| #Pages |
4 |
| Date of Issue |
2019-07-26 (IDY) |
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