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Paper Abstract and Keywords
Presentation 2023-08-02 13:15
[Invited Talk] A Nanosheet Oxide Semiconductor FET Using ALD InGaOx Channel and InSnOx Electrode for 3D Integrated Devices
Masaharu Kobayashi, Kaito Hikake, Zhuo Li, Junxiang Hao, Chitra Pandy, Takuya Saraya, Toshiro Hiramoto (Univ. Tokyo), Takanori Takahashi, Mutsunori Uenuma, Yukiharu Uraoka (NAIST)
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Reference Info. ITE Tech. Rep.
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Date of Issue  
ISSN Online edition: ISSN 2424-1970
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Conference Information
Committee IEICE-ICD IEICE-SDM IST  
Conference Date 2023-08-01 - 2023-08-03 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English) Analog, Mixed Analog and Digital, RF, and Sensor Interface, Low Voltage/Low Power Techniques, Novel Devices/Circuits, and the Applications 
Paper Information
Registration To IEICE-SDM 
Conference Code 2023-08-SDM-ICD-IST 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) A Nanosheet Oxide Semiconductor FET Using ALD InGaOx Channel and InSnOx Electrode for 3D Integrated Devices 
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1st Author's Name Masaharu Kobayashi  
1st Author's Affiliation The University of Tokyo (Univ. Tokyo)
2nd Author's Name Kaito Hikake  
2nd Author's Affiliation The University of Tokyo (Univ. Tokyo)
3rd Author's Name Zhuo Li  
3rd Author's Affiliation The University of Tokyo (Univ. Tokyo)
4th Author's Name Junxiang Hao  
4th Author's Affiliation The University of Tokyo (Univ. Tokyo)
5th Author's Name Chitra Pandy  
5th Author's Affiliation The University of Tokyo (Univ. Tokyo)
6th Author's Name Takuya Saraya  
6th Author's Affiliation The University of Tokyo (Univ. Tokyo)
7th Author's Name Toshiro Hiramoto  
7th Author's Affiliation The University of Tokyo (Univ. Tokyo)
8th Author's Name Takanori Takahashi  
8th Author's Affiliation NAIST (NAIST)
9th Author's Name Mutsunori Uenuma  
9th Author's Affiliation NAIST (NAIST)
10th Author's Name Yukiharu Uraoka  
10th Author's Affiliation NAIST (NAIST)
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Date Time 2023-08-02 13:15:00 
Presentation Time 45 minutes 
Registration for IEICE-SDM 
Paper #  
Volume (vol) vol.47 
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