| Paper Abstract and Keywords |
| Presentation |
2024-08-05 13:00
[Memorial Lecture]
Simulation Method for the Mean Free Path of Semiconductor Nanosheets with Surface Roughness
Jo Okada, Hajime Tanaka, Nobuya Mori (Osaka Univ.) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
In semiconductor nanosheets, as the channel becomes thinner, the interface roughness scattering increases and the carrier mobility decreases. Many methods based on perturbation theory have been proposed to model the roughness scattering. In order to verify the validity of these approaches, a calculation method that does not rely on perturbation theory is needed. In this study, we propose a perturbation-free numerical method for the mean free path limited by the interface roughness scattering in single-mode semiconductor nanosheets. Using the proposed method, we calculate the dependence of the mean free path on the channel thickness (Tw), and show that the well-known Tw^6 dependence exists when Tw is large, but becomes weaker when Tw is small. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
semiconductor nanosheet / roughness scattering / Andersonlocalization / ultra-small transistor / device simulation / / / |
| Reference Info. |
ITE Tech. Rep. |
| Paper # |
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| Date of Issue |
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| ISSN |
Online edition: ISSN 2424-1970 |
| Download PDF |
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| Conference Information |
| Committee |
IEICE-ICD IEICE-SDM IST |
| Conference Date |
2024-08-05 - 2024-08-07 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
|
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Analog, Mixed Analog and Digital, RF, and Sensor Interface, Low Voltage/Low Power Techniques, Novel Devices/Circuits, and the Applications |
| Paper Information |
| Registration To |
IEICE-SDM |
| Conference Code |
2024-08-SDM-ICD-IST |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Simulation Method for the Mean Free Path of Semiconductor Nanosheets with Surface Roughness |
| Sub Title (in English) |
|
| Keyword(1) |
semiconductor nanosheet |
| Keyword(2) |
roughness scattering |
| Keyword(3) |
Andersonlocalization |
| Keyword(4) |
ultra-small transistor |
| Keyword(5) |
device simulation |
| Keyword(6) |
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| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Jo Okada |
| 1st Author's Affiliation |
Osaka University (Osaka Univ.) |
| 2nd Author's Name |
Hajime Tanaka |
| 2nd Author's Affiliation |
Osaka University (Osaka Univ.) |
| 3rd Author's Name |
Nobuya Mori |
| 3rd Author's Affiliation |
Osaka University (Osaka Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2024-08-05 13:00:00 |
| Presentation Time |
45 minutes |
| Registration for |
IEICE-SDM |
| Paper # |
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| Volume (vol) |
vol.48 |
| Number (no) |
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| Page |
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| #Pages |
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