| Paper Abstract and Keywords |
| Presentation |
2025-06-05 13:00
Fabrication of metal based thin films with perpendicular magnetization, low saturation magnetic field, and high saturation magnetization for Realization of Novel Magnetic Field Sensors with High Sensitivity and High Signal Output
Soichi Tanaka, Ryuji Takiura, Genta Egawa, Satoru Yoshimura (Akita Univ.) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
A novel magnetic field sensor composed of a BiFeO₃(BFO)-based ferromagnetic/ferroelectric thin film and a metallic perpendicular soft magnetic thin film is proposed to realize high sensitivity, high signal output, and low power. In this magnetic field sensor, magnetization direction and electric polarity of the BFO-based thin film are reversed and generated by magnetization transfer using the magnetic field generated from the perpendicular soft magnetic thin film when a small magnetic field is applied to the perpendicular soft magnetic thin film and the magnetization of this thin film is reversed. To realize this magnetic field sensor, it is necessary to fabricate the metallic perpendicular soft magnetic thin film with high saturation magnetization, low saturation magnetic field, and perpendicular magnetization. Therefore, firstly, we fabricated the [Co/Pd]n multilayers (n is the number of layers), which are widely known as metallic perpendicular magnetic thin films, [CoFeB/Pd]n, and [CoZrNb/Pd]n multilayers, with various number of layers and the thickness ratio of magnetic and nonmagnetic layers under a total film thickness of 20 nm. The results showed that saturation magnetic field of the [Co/Pd]n multilayer was 5.4 kOe, while those of the [CoFeB/Pd]n and [CoZrNb/Pd]n multilayers were relatively small, 3.5 kOe and 1.8 kOe, respectively. However, the saturation magnetization of both multilayers was about 300 emu/cm³, which is not sufficient to control the magnetization direction of BFO-based thin films by magnetic transfer. Therefore, secondary, we fabricated the Co80-(Pt or Pd)20 alloy thin films with c-plane oriented hexagonal crystals (HCP), which are known to exhibit large saturation magnetization and perpendicular magnetic anisotropy, with various deposition temperature and film thickness. As a result, Co-(Pt or Pd) alloy thin films with thicknesses of 5-10 nm fabricated at 300°C showed large perpendicular magnetic anisotropy, high saturation magnetization (around 1000 emu/cm³), and relatively low saturation magnetic field due to high HCP (002) orientation. Furthermore, by applying these results, we have developed a [Co-Pt/Pt/Co-Pt]n stacked film to achieve high HCP(002) orientation even when the total thickness of the magnetic stacked film is 20 nm, thereby improving the magnetic volume. As a result, we have succeeded in the fabrication of magnetic thin film with thickness of 20 nm, high saturation magnetization, low saturation magnetic field, and perpendicular magnetization, which could not be achieved with the above multilayer film system or alloy single layer thin film. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
Co-based multilayer films / Co-based alloy films / saturation magnetization / low saturation magnetic field / perpendicular magnetization anisotropy / magnetic field sensor / / |
| Reference Info. |
ITE Tech. Rep., vol. 49, no. 15, MMS2025-41, pp. 1-8, June 2025. |
| Paper # |
MMS2025-41 |
| Date of Issue |
2025-05-29 (MMS) |
| ISSN |
Online edition: ISSN 2424-1970 |
| Download PDF |
|
| Conference Information |
| Committee |
IEICE-MRIS MMS TOHOKU |
| Conference Date |
2025-06-05 - 2025-06-06 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
RIEC, Tohoku Univ. |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Recording System, Head, Medium + General |
| Paper Information |
| Registration To |
MMS |
| Conference Code |
2025-06-MRIS-MMS-TOHOKU |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Fabrication of metal based thin films with perpendicular magnetization, low saturation magnetic field, and high saturation magnetization for Realization of Novel Magnetic Field Sensors with High Sensitivity and High Signal Output |
| Sub Title (in English) |
|
| Keyword(1) |
Co-based multilayer films |
| Keyword(2) |
Co-based alloy films |
| Keyword(3) |
saturation magnetization |
| Keyword(4) |
low saturation magnetic field |
| Keyword(5) |
perpendicular magnetization anisotropy |
| Keyword(6) |
magnetic field sensor |
| Keyword(7) |
|
| Keyword(8) |
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| 1st Author's Name |
Soichi Tanaka |
| 1st Author's Affiliation |
Akita University (Akita Univ.) |
| 2nd Author's Name |
Ryuji Takiura |
| 2nd Author's Affiliation |
Akita University (Akita Univ.) |
| 3rd Author's Name |
Genta Egawa |
| 3rd Author's Affiliation |
Akita University (Akita Univ.) |
| 4th Author's Name |
Satoru Yoshimura |
| 4th Author's Affiliation |
Akita University (Akita Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2025-06-05 13:00:00 |
| Presentation Time |
25 minutes |
| Registration for |
MMS |
| Paper # |
MMS2025-41 |
| Volume (vol) |
vol.49 |
| Number (no) |
no.15 |
| Page |
pp.1-8 |
| #Pages |
8 |
| Date of Issue |
2025-05-29 (MMS) |
|