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IST 2022-03-28
Online   A Back Illuminated 6 μm SPAD Pixel Array with High PDE and Timing Jitter Performance
Shohei Shimada, Yusuke Otake, Satoru Yoshida, Suzunori Endo, Ryoichi Nakamura, Hidenobu Tsugawa, Tomohiro Ogita, Takayuki Ogasahara, Kaito Yokochi, Yuji Inoue, Kosaku Takabayashi, Hidenori Maeda, Koji Yamamoto, Makoto Ono, Shizunori Matsumoto, Hiroki Hiyama, Toshifumi Wakano (Sony)
We present a high-performance Single Photon Avalanche Diode (SPAD) pixel array sensor with 3D-stacked Back Illumination ... [more] IST2022-20
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