| Paper Abstract and Keywords |
| Presentation |
2022-03-28 15:40
A Back Illuminated 6 μm SPAD Pixel Array with High PDE and Timing Jitter Performance
Shohei Shimada, Yusuke Otake, Satoru Yoshida, Suzunori Endo, Ryoichi Nakamura, Hidenobu Tsugawa, Tomohiro Ogita, Takayuki Ogasahara, Kaito Yokochi, Yuji Inoue, Kosaku Takabayashi, Hidenori Maeda, Koji Yamamoto, Makoto Ono, Shizunori Matsumoto, Hiroki Hiyama, Toshifumi Wakano (Sony) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
We present a high-performance Single Photon Avalanche Diode (SPAD) pixel array sensor with 3D-stacked Back Illumination (BI) fabricated via a 300mm CMOS process platform. In comparison to our 10μm pixel generation, the 6μm generation comes with several improvements. In particular, the top-tier pixel chip makes use of a Pyramid Surface for Diffraction (PSD) that boosts the Photon Detection Efficiency (PDE) in the near-infrared. Not only did we achieve a PDE of over 20% at 940nm with 3.0V excess bias, but via pixel potential re-engineering, we could also improve the timing jitter beyond our 10μm architecture. As in our previous SPAD sensor generation, the connection to the bottom-tier readout circuit chip is realized via Cu-Cu bonding to maximize the sensor’s fill factor. This new 6µm SPAD sensor paves the way to direct-Time of Flight (d-ToF) with even higher efficiency and accuracy than was previously possible. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
Single Photon Avalanche Diode / SPAD depth sensor / d-ToF / Back Illuminated / / / / |
| Reference Info. |
ITE Tech. Rep., vol. 46, no. 14, IST2022-20, pp. 43-46, March 2022. |
| Paper # |
IST2022-20 |
| Date of Issue |
2022-03-21 (IST) |
| ISSN |
Print edition: ISSN 1342-6893 Online edition: ISSN 2424-1970 |
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