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Paper Abstract and Keywords
Presentation 2022-03-28 15:40
A Back Illuminated 6 μm SPAD Pixel Array with High PDE and Timing Jitter Performance
Shohei Shimada, Yusuke Otake, Satoru Yoshida, Suzunori Endo, Ryoichi Nakamura, Hidenobu Tsugawa, Tomohiro Ogita, Takayuki Ogasahara, Kaito Yokochi, Yuji Inoue, Kosaku Takabayashi, Hidenori Maeda, Koji Yamamoto, Makoto Ono, Shizunori Matsumoto, Hiroki Hiyama, Toshifumi Wakano (Sony)
Abstract (in Japanese) (See Japanese page) 
(in English) We present a high-performance Single Photon Avalanche Diode (SPAD) pixel array sensor with 3D-stacked Back Illumination (BI) fabricated via a 300mm CMOS process platform. In comparison to our 10μm pixel generation, the 6μm generation comes with several improvements. In particular, the top-tier pixel chip makes use of a Pyramid Surface for Diffraction (PSD) that boosts the Photon Detection Efficiency (PDE) in the near-infrared. Not only did we achieve a PDE of over 20% at 940nm with 3.0V excess bias, but via pixel potential re-engineering, we could also improve the timing jitter beyond our 10μm architecture. As in our previous SPAD sensor generation, the connection to the bottom-tier readout circuit chip is realized via Cu-Cu bonding to maximize the sensor’s fill factor. This new 6µm SPAD sensor paves the way to direct-Time of Flight (d-ToF) with even higher efficiency and accuracy than was previously possible.
Keyword (in Japanese) (See Japanese page) 
(in English) Single Photon Avalanche Diode / SPAD depth sensor / d-ToF / Back Illuminated / / / /  
Reference Info. ITE Tech. Rep., vol. 46, no. 14, IST2022-20, pp. 43-46, March 2022.
Paper # IST2022-20 
Date of Issue 2022-03-21 (IST) 
ISSN Print edition: ISSN 1342-6893  Online edition: ISSN 2424-1970
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Conference Information
Committee IST  
Conference Date 2022-03-28 - 2022-03-28 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To IST 
Conference Code 2022-03-IST 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) A Back Illuminated 6 μm SPAD Pixel Array with High PDE and Timing Jitter Performance 
Sub Title (in English)  
Keyword(1) Single Photon Avalanche Diode  
Keyword(2) SPAD depth sensor  
Keyword(3) d-ToF  
Keyword(4) Back Illuminated  
Keyword(5)  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Shohei Shimada  
1st Author's Affiliation Sony Semiconductor Solutions (Sony)
2nd Author's Name Yusuke Otake  
2nd Author's Affiliation Sony Semiconductor Solutions (Sony)
3rd Author's Name Satoru Yoshida  
3rd Author's Affiliation Sony Semiconductor Solutions (Sony)
4th Author's Name Suzunori Endo  
4th Author's Affiliation Sony Semiconductor Solutions (Sony)
5th Author's Name Ryoichi Nakamura  
5th Author's Affiliation Sony Semiconductor Solutions (Sony)
6th Author's Name Hidenobu Tsugawa  
6th Author's Affiliation Sony Semiconductor Solutions (Sony)
7th Author's Name Tomohiro Ogita  
7th Author's Affiliation Sony Semiconductor Solutions (Sony)
8th Author's Name Takayuki Ogasahara  
8th Author's Affiliation Sony Semiconductor Solutions (Sony)
9th Author's Name Kaito Yokochi  
9th Author's Affiliation Sony Semiconductor Solutions (Sony)
10th Author's Name Yuji Inoue  
10th Author's Affiliation Sony Semiconductor Manufacturing (Sony)
11th Author's Name Kosaku Takabayashi  
11th Author's Affiliation Sony Semiconductor Manufacturing (Sony)
12th Author's Name Hidenori Maeda  
12th Author's Affiliation Sony Semiconductor Manufacturing (Sony)
13th Author's Name Koji Yamamoto  
13th Author's Affiliation Sony Semiconductor Manufacturing (Sony)
14th Author's Name Makoto Ono  
14th Author's Affiliation Sony Semiconductor Manufacturing (Sony)
15th Author's Name Shizunori Matsumoto  
15th Author's Affiliation Sony Semiconductor Manufacturing (Sony)
16th Author's Name Hiroki Hiyama  
16th Author's Affiliation Sony Semiconductor Manufacturing (Sony)
17th Author's Name Toshifumi Wakano  
17th Author's Affiliation Sony Semiconductor Solutions (Sony)
18th Author's Name  
18th Author's Affiliation ()
19th Author's Name  
19th Author's Affiliation ()
20th Author's Name  
20th Author's Affiliation ()
Speaker
Date Time 2022-03-28 15:40:00 
Presentation Time 30 
Registration for IST 
Paper # IST2022-20 
Volume (vol) 46 
Number (no) no.14 
Page pp.43-46 
#Pages
Date of Issue 2022-03-21 (IST) 


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