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Presentation 0000-00-00 00:00
A CMOS-MEMS-Based Label-Free Protein Sensor Using Fabry-Perot Interferometer
Ryo Ozawa, Kazuhiro Takahashi, Hiroki Oyama, Masato Futagawa, Fumihiro Dasai, Makoto Ishida, Kazuaki Sawada (Toyohashi Tech.)
Abstract (in Japanese) (See Japanese page) 
(in English) We have developed a CMOS-MEMS-based label-free protein sensor, which utilizes nonlinear optical transmittance change by the Fabry-Perot interference to enhance the sensitivity of surface-stress. Theoretical minimum detectable surface stress of the proposed sensor is predicted -1 N/m which is two orders of magnitude above the peizoresistive type. A read-out tiny photocurrent from the multidimensional arrayed MEMS sensor is signal-processed by integrated source follower circuit, selector, and decoder. We successfully demonstrated the MOSFET and MEMS sensor and established the heterogeneous integration process. The integrated MEMS sensor array can be used for screening analysis for any cancers.
Keyword (in Japanese) (See Japanese page) 
(in English) Fabry-Perot interference / surface-stress / protein / label-free / heterogeneous integration / / /  
Reference Info. ITE Tech. Rep.
Paper #  
Date of Issue  
ISSN Print edition: ISSN 1342-6893  Online edition: ISSN 2424-1970
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Conference Information
Committee IST  
Conference Date 2013-03-22 - 2013-03-22 
Place (in Japanese) (See Japanese page) 
Place (in English) NHK Science & Technology Research Laboratories 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Image Sensors, etc 
Paper Information
Registration To IST 
Conference Code 2013-03-IST 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) A CMOS-MEMS-Based Label-Free Protein Sensor Using Fabry-Perot Interferometer 
Sub Title (in English)  
Keyword(1) Fabry-Perot interference  
Keyword(2) surface-stress  
Keyword(3) protein  
Keyword(4) label-free  
Keyword(5) heterogeneous integration  
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1st Author's Name Ryo Ozawa  
1st Author's Affiliation Toyohashi University of Technology (Toyohashi Tech.)
2nd Author's Name Kazuhiro Takahashi  
2nd Author's Affiliation Toyohashi University of Technology (Toyohashi Tech.)
3rd Author's Name Hiroki Oyama  
3rd Author's Affiliation Toyohashi University of Technology (Toyohashi Tech.)
4th Author's Name Masato Futagawa  
4th Author's Affiliation Toyohashi University of Technology (Toyohashi Tech.)
5th Author's Name Fumihiro Dasai  
5th Author's Affiliation Toyohashi University of Technology (Toyohashi Tech.)
6th Author's Name Makoto Ishida  
6th Author's Affiliation Toyohashi University of Technology (Toyohashi Tech.)
7th Author's Name Kazuaki Sawada  
7th Author's Affiliation Toyohashi University of Technology (Toyohashi Tech.)
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