Paper Abstract and Keywords |
Presentation |
0000-00-00 00:00
A CMOS-MEMS-Based Label-Free Protein Sensor Using Fabry-Perot Interferometer Ryo Ozawa, Kazuhiro Takahashi, Hiroki Oyama, Masato Futagawa, Fumihiro Dasai, Makoto Ishida, Kazuaki Sawada (Toyohashi Tech.) |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
We have developed a CMOS-MEMS-based label-free protein sensor, which utilizes nonlinear optical transmittance change by the Fabry-Perot interference to enhance the sensitivity of surface-stress. Theoretical minimum detectable surface stress of the proposed sensor is predicted -1 N/m which is two orders of magnitude above the peizoresistive type. A read-out tiny photocurrent from the multidimensional arrayed MEMS sensor is signal-processed by integrated source follower circuit, selector, and decoder. We successfully demonstrated the MOSFET and MEMS sensor and established the heterogeneous integration process. The integrated MEMS sensor array can be used for screening analysis for any cancers. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Fabry-Perot interference / surface-stress / protein / label-free / heterogeneous integration / / / |
Reference Info. |
ITE Tech. Rep. |
Paper # |
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Date of Issue |
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ISSN |
Print edition: ISSN 1342-6893 Online edition: ISSN 2424-1970 |
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