Paper Abstract and Keywords |
Presentation |
0000-00-00 00:00
1.12um Cell Low-Noise Front Side Illumination Image Sensors with Light Pipe: SmartFSI® Naohisa Sengoku, Tatsuya Hirata, Keishi Tachikawa, Tetsuya Nakamura, Hisashi Watanabe, Ryohei Miyagawa, Hirohisa Ohtsuki, Shigeyuki Ohno, Tomotsugu Takeda, Kouichi Yamamoto, Shigeru Suzuki, Hisashi Yano, Ken-ichi Origasa, Hiroyuki Amikawa, Shin-ichi Ogita (Panasonic) |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
We have developed 1.12um cell size low-noise front side illumination (FSI) CMOS image sensor with light pipe: SmartFSI®. Adopting unique bended light pipe structure, and optimizing cell layout and potential profile in photo diode, we realized quite high quantum efficiency (QE) of 72% and low read-out noise of 0.9ele, which exceeds the performance of backside illumination (BSI) image sensors. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Image sensor / FSI / 1.12um cell / light pipe / CRA / / / |
Reference Info. |
ITE Tech. Rep. |
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