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Paper Abstract and Keywords
Presentation 2010-03-26 16:10
0.9um Pitch Pixel CMOS Image Sensor Device Design Methodology
Kazuichiro Itonaga, Kyohei Mizuta, Toyotaka Kataoka (Sony), Masashi Yanagita, Shintaro Yamauchi (SCK), Ikeda Harumi, Tsutomu Haruta, Shizunori Matsumoto (Sony), Masanori Harasawa, Takeshi Matsuda, Akira Matsumoto (SCK), Ikue Mizuno (Sony), Takatoshi Kameshima, Iwao Sugiura (SCK), Teruo Hirayama (Sony)
Abstract (in Japanese) (See Japanese page) 
(in English) We proposed the constant-light-diffraction methodology in order to design the CMOS image sensor (CIS).
We developed a reliable guideline, and verified it using CISs with various pixel pitches and number of metal wiring layers.
Using this guideline, we realized the first ever successful fabrication of 1.12 and 0.9m pitch CISs and simulated that the light shield technology node in order to satisfy the guideline for the future.
Keyword (in Japanese) (See Japanese page) 
(in English) image sensor / quantum Efficiency / pixel pitch / diffraction light / apature ratio / light shield / FSI / BSI  
Reference Info. ITE Tech. Rep., vol. 34, no. 16, IST2010-20, pp. 55-58, March 2010.
Paper # IST2010-20 
Date of Issue 2010-03-19 (IST, CE) 
ISSN Print edition: ISSN 1342-6893
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Conference Information
Committee IST CE  
Conference Date 2010-03-26 - 2010-03-26 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To IST 
Conference Code 2010-03-IST-CE 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) 0.9um Pitch Pixel CMOS Image Sensor Device Design Methodology 
Sub Title (in English)  
Keyword(1) image sensor  
Keyword(2) quantum Efficiency  
Keyword(3) pixel pitch  
Keyword(4) diffraction light  
Keyword(5) apature ratio  
Keyword(6) light shield  
Keyword(7) FSI  
Keyword(8) BSI  
1st Author's Name Kazuichiro Itonaga  
1st Author's Affiliation Sony Corporation (Sony)
2nd Author's Name Kyohei Mizuta  
2nd Author's Affiliation Sony Corporation (Sony)
3rd Author's Name Toyotaka Kataoka  
3rd Author's Affiliation Sony Corporation (Sony)
4th Author's Name Masashi Yanagita  
4th Author's Affiliation Sony Semiconductor kyushu Corporation (SCK)
5th Author's Name Shintaro Yamauchi  
5th Author's Affiliation Sony Semiconductor kyushu Corporation (SCK)
6th Author's Name Ikeda Harumi  
6th Author's Affiliation Sony Corporation (Sony)
7th Author's Name Tsutomu Haruta  
7th Author's Affiliation Sony Corporation (Sony)
8th Author's Name Shizunori Matsumoto  
8th Author's Affiliation Sony LSI Design Corporation (Sony)
9th Author's Name Masanori Harasawa  
9th Author's Affiliation Sony Semiconductor kyushu Corporation (SCK)
10th Author's Name Takeshi Matsuda  
10th Author's Affiliation Sony Semiconductor kyushu Corporation (SCK)
11th Author's Name Akira Matsumoto  
11th Author's Affiliation Sony Semiconductor kyushu Corporation (SCK)
12th Author's Name Ikue Mizuno  
12th Author's Affiliation Sony Corporation (Sony)
13th Author's Name Takatoshi Kameshima  
13th Author's Affiliation Sony Semiconductor kyushu Corporation (SCK)
14th Author's Name Iwao Sugiura  
14th Author's Affiliation Sony Semiconductor kyushu Corporation (SCK)
15th Author's Name Teruo Hirayama  
15th Author's Affiliation Sony Corporation (Sony)
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Speaker Author-1 
Date Time 2010-03-26 16:10:00 
Presentation Time 25 minutes 
Registration for IST 
Paper # IST2010-20, CE2010-29 
Volume (vol) vol.34 
Number (no) no.16 
Page pp.55-58 
#Pages 4 
Date of Issue 2010-03-19 (IST, CE) 

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