| Paper Abstract and Keywords |
| Presentation |
2010-09-27 16:30
Techniques for high accurate and fast measurement of RTN and fabrication process conditions having a strong influence on RTN characteristics
Kenichi Abe, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ.) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
Physical analysis and reduction of random telegraph noise (RTN), which has become a major problem on advanced CMOS image sensor, are strongly required. This report proposes a new method to measure time constants and amplitudes of RTN with high precision and high speed by a large arrayed DUT test circuit based on CMOS image sensor technology. Moreover, we demonstrate some results from analysis of manufacturing process conditions which have strong effects on RTN characteristics. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
MOSFET / Random Telegraph Noise (RTN) / CMOS image sensor / test circuit / / / / |
| Reference Info. |
ITE Tech. Rep., vol. 34, no. 38, IST2010-47, pp. 29-32, Sept. 2010. |
| Paper # |
IST2010-47 |
| Date of Issue |
2010-09-20 (IST) |
| ISSN |
Print edition: ISSN 1342-6893 |
| Download PDF |
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| Conference Information |
| Committee |
IST |
| Conference Date |
2010-09-27 - 2010-09-27 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
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| Paper Information |
| Registration To |
IST |
| Conference Code |
2010-09-IST |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Techniques for high accurate and fast measurement of RTN and fabrication process conditions having a strong influence on RTN characteristics |
| Sub Title (in English) |
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| Keyword(1) |
MOSFET |
| Keyword(2) |
Random Telegraph Noise (RTN) |
| Keyword(3) |
CMOS image sensor |
| Keyword(4) |
test circuit |
| Keyword(5) |
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| 1st Author's Name |
Kenichi Abe |
| 1st Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 2nd Author's Name |
Akinobu Teramoto |
| 2nd Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 3rd Author's Name |
Shigetoshi Sugawa |
| 3rd Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 4th Author's Name |
Tadahiro Ohmi |
| 4th Author's Affiliation |
Tohoku University (Tohoku Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2010-09-27 16:30:00 |
| Presentation Time |
30 minutes |
| Registration for |
IST |
| Paper # |
IST2010-47 |
| Volume (vol) |
vol.34 |
| Number (no) |
no.38 |
| Page |
pp.29-32 |
| #Pages |
4 |
| Date of Issue |
2010-09-20 (IST) |