| Paper Abstract and Keywords |
| Presentation |
2011-11-18 15:50
[Invited Talk]
Highly Ultraviolet Light Sensitive and Highly Reliable Photodiode with Atomically Flat Si Surface
Rihito Kuroda, Taiki Nakazawa, Yasumasa Koda, Katsuhiko Hanzawa, Shigetoshi Sugawa (Tonoku Univ.) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
This reports demonstrates the highly ultraviolet light sensitive and highly reliable photodiode using atomically flat Si surface. Technologies to atomically flatten Si(100) orientated surface and integration process technologies to preserve the atomic flatness are summarized. The key technologies to form the ultrathin and uniform surface photo-generated carrier drift layer and its effectiveness to the sensitivity improvement to ultraviolet light and reliability improvement to ultraviolet light exposure are reported. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
Photodiode / Ultraviolet light / Atomically Flat Si Surface / / / / / |
| Reference Info. |
ITE Tech. Rep., vol. 35, no. 47, IST2011-74, pp. 25-31, Nov. 2011. |
| Paper # |
IST2011-74 |
| Date of Issue |
2011-11-11 (IST) |
| ISSN |
Print edition: ISSN 1342-6893 |
| Download PDF |
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| Conference Information |
| Committee |
IST |
| Conference Date |
2011-11-18 - 2011-11-18 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
2011 International Image Sensor Workshop (IISW), etc |
| Paper Information |
| Registration To |
IST |
| Conference Code |
2011-11-IST |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Highly Ultraviolet Light Sensitive and Highly Reliable Photodiode with Atomically Flat Si Surface |
| Sub Title (in English) |
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| Keyword(1) |
Photodiode |
| Keyword(2) |
Ultraviolet light |
| Keyword(3) |
Atomically Flat Si Surface |
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| 1st Author's Name |
Rihito Kuroda |
| 1st Author's Affiliation |
Tohoku University (Tonoku Univ.) |
| 2nd Author's Name |
Taiki Nakazawa |
| 2nd Author's Affiliation |
Tohoku University (Tonoku Univ.) |
| 3rd Author's Name |
Yasumasa Koda |
| 3rd Author's Affiliation |
Tohoku University (Tonoku Univ.) |
| 4th Author's Name |
Katsuhiko Hanzawa |
| 4th Author's Affiliation |
Tohoku University (Tonoku Univ.) |
| 5th Author's Name |
Shigetoshi Sugawa |
| 5th Author's Affiliation |
Tohoku University (Tonoku Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2011-11-18 15:50:00 |
| Presentation Time |
50 minutes |
| Registration for |
IST |
| Paper # |
IST2011-74 |
| Volume (vol) |
vol.35 |
| Number (no) |
no.47 |
| Page |
pp.25-31 |
| #Pages |
7 |
| Date of Issue |
2011-11-11 (IST) |