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Paper Abstract and Keywords
Presentation 2011-11-18 15:50
[Invited Talk] Highly Ultraviolet Light Sensitive and Highly Reliable Photodiode with Atomically Flat Si Surface
Rihito Kuroda, Taiki Nakazawa, Yasumasa Koda, Katsuhiko Hanzawa, Shigetoshi Sugawa (Tonoku Univ.)
Abstract (in Japanese) (See Japanese page) 
(in English) This reports demonstrates the highly ultraviolet light sensitive and highly reliable photodiode using atomically flat Si surface. Technologies to atomically flatten Si(100) orientated surface and integration process technologies to preserve the atomic flatness are summarized. The key technologies to form the ultrathin and uniform surface photo-generated carrier drift layer and its effectiveness to the sensitivity improvement to ultraviolet light and reliability improvement to ultraviolet light exposure are reported.
Keyword (in Japanese) (See Japanese page) 
(in English) Photodiode / Ultraviolet light / Atomically Flat Si Surface / / / / /  
Reference Info. ITE Tech. Rep., vol. 35, no. 47, IST2011-74, pp. 25-31, Nov. 2011.
Paper # IST2011-74 
Date of Issue 2011-11-11 (IST) 
ISSN Print edition: ISSN 1342-6893  Online edition: ISSN 2424-1970

Conference Information
Committee IST  
Conference Date 2011-11-18 - 2011-11-18 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) 2011 International Image Sensor Workshop (IISW), etc 
Paper Information
Registration To IST 
Conference Code 2011-11-IST 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Highly Ultraviolet Light Sensitive and Highly Reliable Photodiode with Atomically Flat Si Surface 
Sub Title (in English)  
Keyword(1) Photodiode  
Keyword(2) Ultraviolet light  
Keyword(3) Atomically Flat Si Surface  
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1st Author's Name Rihito Kuroda  
1st Author's Affiliation Tohoku University (Tonoku Univ.)
2nd Author's Name Taiki Nakazawa  
2nd Author's Affiliation Tohoku University (Tonoku Univ.)
3rd Author's Name Yasumasa Koda  
3rd Author's Affiliation Tohoku University (Tonoku Univ.)
4th Author's Name Katsuhiko Hanzawa  
4th Author's Affiliation Tohoku University (Tonoku Univ.)
5th Author's Name Shigetoshi Sugawa  
5th Author's Affiliation Tohoku University (Tonoku Univ.)
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Speaker
Date Time 2011-11-18 15:50:00 
Presentation Time 50 
Registration for IST 
Paper # ITE-IST2011-74 
Volume (vol) ITE-35 
Number (no) no.47 
Page pp.25-31 
#Pages ITE-7 
Date of Issue ITE-IST-2011-11-11 


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