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Paper Abstract and Keywords
Presentation 2012-03-30 15:45
A 1.4um front-side illuminated image sensor with novel light guiding structure consisting of stacked lightpipes
Hisashi Watanabe, Jun Hirai, Motonari Katsuno, Keishi Tachikawa, Masao Kataoka, Saori Kawagishi, Hiroko Kubo, Hisashi Yano, Shigeru Suzuki, Gen Okazaki, Kouichi Yamamoto, Hiroshi Fujinaka, Takashi Fujioka, Masakatsu Suzuki (Panasonic)
Abstract (in Japanese) (See Japanese page) 
(in English) A frontside illuminated image (FSI) sensor with novel light guiding structures consisting of stacked lightpipes was developed using 45nm Cu processing on 300 mm wafers. We demonstrated a high quantum efficiency (QE) of 75% and maximum incident angle of 40º, which exceeds the performance of backside illuminated image (BSI) sensors [1,2,3].
Keyword (in Japanese) (See Japanese page) 
(in English) Image sensor / FSI / Lightpipe / Separation wall / 1.4μm pixel / / /  
Reference Info. ITE Tech. Rep., vol. 36, no. 18, IST2012-14, pp. 37-40, March 2012.
Paper # IST2012-14 
Date of Issue 2012-03-23 (IST, CE) 
ISSN Print edition: ISSN 1342-6893
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Conference Information
Committee IST CE  
Conference Date 2012-03-30 - 2012-03-30 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To IST 
Conference Code 2012-03-IST-CE 
Language English 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) A 1.4um front-side illuminated image sensor with novel light guiding structure consisting of stacked lightpipes 
Sub Title (in English)  
Keyword(1) Image sensor  
Keyword(2) FSI  
Keyword(3) Lightpipe  
Keyword(4) Separation wall  
Keyword(5) 1.4μm pixel  
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1st Author's Name Hisashi Watanabe  
1st Author's Affiliation Panasonic Corporation (Panasonic)
2nd Author's Name Jun Hirai  
2nd Author's Affiliation Panasonic Corporation (Panasonic)
3rd Author's Name Motonari Katsuno  
3rd Author's Affiliation Panasonic Corporation (Panasonic)
4th Author's Name Keishi Tachikawa  
4th Author's Affiliation Panasonic Corporation (Panasonic)
5th Author's Name Masao Kataoka  
5th Author's Affiliation Panasonic Corporation (Panasonic)
6th Author's Name Saori Kawagishi  
6th Author's Affiliation Panasonic Corporation (Panasonic)
7th Author's Name Hiroko Kubo  
7th Author's Affiliation Panasonic Corporation (Panasonic)
8th Author's Name Hisashi Yano  
8th Author's Affiliation Panasonic Corporation (Panasonic)
9th Author's Name Shigeru Suzuki  
9th Author's Affiliation Panasonic Corporation (Panasonic)
10th Author's Name Gen Okazaki  
10th Author's Affiliation Panasonic Corporation (Panasonic)
11th Author's Name Kouichi Yamamoto  
11th Author's Affiliation Panasonic Corporation (Panasonic)
12th Author's Name Hiroshi Fujinaka  
12th Author's Affiliation Panasonic Corporation (Panasonic)
13th Author's Name Takashi Fujioka  
13th Author's Affiliation Panasonic Corporation (Panasonic)
14th Author's Name Masakatsu Suzuki  
14th Author's Affiliation Panasonic Corporation (Panasonic)
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Speaker Author-1 
Date Time 2012-03-30 15:45:00 
Presentation Time 30 minutes 
Registration for IST 
Paper # IST2012-14, CE2012-26 
Volume (vol) vol.36 
Number (no) no.18 
Page pp.37-40 
#Pages 4 
Date of Issue 2012-03-23 (IST, CE) 

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