| Paper Abstract and Keywords |
| Presentation |
2012-05-28 13:00
[Poster Presentation]
Photodiode dopant profile with atomically flat Si surface for high sensitivity and stability to UV-light.
Taiki Nakazawa, Rihito Kuroda, Yasumasa Koda, Shigetoshi Sugawa (Tohoku Univ.) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
For sensors with high ultraviolet light (UV-light) sensitivity and high stability to UV-light, photodiodes with various surface high concentration layer profiles formed on the atomically flat Si surface were evaluated to investigate the relationships between the surface photo-generated carrier drift layer and sensitivity and stability to UV-light. It was clarified that the change of UV-light sensitivity due to UV-light exposure is caused by the generation of fixed charges in SiO2 and traps near the Si/SiO2 interface. Finally, photodiode dopant profile for high sensitivity and stability to UV-light was proposed. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
UV-light Sensor / Atomically Flat Si Surface / Surface Photo-generated Drift Layer / / / / / |
| Reference Info. |
ITE Tech. Rep., vol. 36, no. 20, IST2012-21, pp. 19-22, May 2012. |
| Paper # |
IST2012-21 |
| Date of Issue |
2012-05-21 (IST) |
| ISSN |
Print edition: ISSN 1342-6893 |
| Download PDF |
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| Conference Information |
| Committee |
IST |
| Conference Date |
2012-05-28 - 2012-05-28 |
| Place (in Japanese) |
(See Japanese page) |
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(See Japanese page) |
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| Paper Information |
| Registration To |
IST |
| Conference Code |
2012-05-IST |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Photodiode dopant profile with atomically flat Si surface for high sensitivity and stability to UV-light. |
| Sub Title (in English) |
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| Keyword(1) |
UV-light Sensor |
| Keyword(2) |
Atomically Flat Si Surface |
| Keyword(3) |
Surface Photo-generated Drift Layer |
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| 1st Author's Name |
Taiki Nakazawa |
| 1st Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 2nd Author's Name |
Rihito Kuroda |
| 2nd Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 3rd Author's Name |
Yasumasa Koda |
| 3rd Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 4th Author's Name |
Shigetoshi Sugawa |
| 4th Author's Affiliation |
Tohoku University (Tohoku Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2012-05-28 13:00:00 |
| Presentation Time |
60 minutes |
| Registration for |
IST |
| Paper # |
IST2012-21 |
| Volume (vol) |
vol.36 |
| Number (no) |
no.20 |
| Page |
pp.19-22 |
| #Pages |
4 |
| Date of Issue |
2012-05-21 (IST) |