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Paper Abstract and Keywords
Presentation 2012-05-28 13:00
[Poster Presentation] Photodiode dopant profile with atomically flat Si surface for high sensitivity and stability to UV-light.
Taiki Nakazawa, Rihito Kuroda, Yasumasa Koda, Shigetoshi Sugawa (Tohoku Univ.)
Abstract (in Japanese) (See Japanese page) 
(in English) For sensors with high ultraviolet light (UV-light) sensitivity and high stability to UV-light, photodiodes with various surface high concentration layer profiles formed on the atomically flat Si surface were evaluated to investigate the relationships between the surface photo-generated carrier drift layer and sensitivity and stability to UV-light. It was clarified that the change of UV-light sensitivity due to UV-light exposure is caused by the generation of fixed charges in SiO2 and traps near the Si/SiO2 interface. Finally, photodiode dopant profile for high sensitivity and stability to UV-light was proposed.
Keyword (in Japanese) (See Japanese page) 
(in English) UV-light Sensor / Atomically Flat Si Surface / Surface Photo-generated Drift Layer / / / / /  
Reference Info. ITE Tech. Rep., vol. 36, no. 20, IST2012-21, pp. 19-22, May 2012.
Paper # IST2012-21 
Date of Issue 2012-05-21 (IST) 
ISSN Print edition: ISSN 1342-6893
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Conference Information
Committee IST  
Conference Date 2012-05-28 - 2012-05-28 
Place (in Japanese) (See Japanese page) 
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Paper Information
Registration To IST 
Conference Code 2012-05-IST 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Photodiode dopant profile with atomically flat Si surface for high sensitivity and stability to UV-light. 
Sub Title (in English)  
Keyword(1) UV-light Sensor  
Keyword(2) Atomically Flat Si Surface  
Keyword(3) Surface Photo-generated Drift Layer  
1st Author's Name Taiki Nakazawa  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
2nd Author's Name Rihito Kuroda  
2nd Author's Affiliation Tohoku University (Tohoku Univ.)
3rd Author's Name Yasumasa Koda  
3rd Author's Affiliation Tohoku University (Tohoku Univ.)
4th Author's Name Shigetoshi Sugawa  
4th Author's Affiliation Tohoku University (Tohoku Univ.)
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Speaker Author-1 
Date Time 2012-05-28 13:00:00 
Presentation Time 60 minutes 
Registration for IST 
Paper # IST2012-21 
Volume (vol) vol.36 
Number (no) no.20 
Page pp.19-22 
Date of Issue 2012-05-21 (IST) 

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