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Paper Abstract and Keywords
Presentation 2013-12-12 16:15
Deposition of Co/Pt film with perpendicular magnetic anisotropy by layer stacking sputtering
Taruho Tsuchiya, Naoki Honda (Tohoku Inst. Tech.)
Abstract (in Japanese) (See Japanese page) 
(in English) Low temperature preparation of Co/Pt stacked film with high magnetic anisotropy was studied using atomic layer stacking collimated sputter-deposition. Although a trace super lattice line corresponding to the L11 ordered phase was observed for films with higher Ar pressure and higher substrate temperature deposition in the X-ray diffraction, L11 ordering was not supposed to be obtained. Magnetic properties, however, exhibited a high saturation magnetization of about 1000 emu/cm3 and a large perpendicular magnetic anisotropy. Low Ar pressure sputtering at 0.8 Pa exhibited little difference in magnetic properties between films deposited at different substrate temperatures. On the contrary, the films deposited at a high Ar pressure of 9.6 Pa exhibited a high coercivity of 5 kOe for RT deposition, but the coercivity decreased and the anisotropy field was increased to be estimated as high as about 20 kOe, which indicated a high perpendicular anisotropy of 1×107 erg/cm3. The cause of the anisotropy was suggested to be come from micro ordering.
Keyword (in Japanese) (See Japanese page) 
(in English) Layer stacking sputter-deposition / Collimated sputtering / Ordered CoPt film / Perpendicular magnetic anisotropy / Low temperature deposition / / /  
Reference Info. ITE Tech. Rep.
Paper #  
Date of Issue  
ISSN Print edition: ISSN 1342-6893  Online edition: ISSN 2424-1970
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Conference Information
Committee IEICE-MRIS MMS  
Conference Date 2013-12-12 - 2013-12-13 
Place (in Japanese) (See Japanese page) 
Place (in English) Ehime Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Signal Processing, etc. 
Paper Information
Registration To IEICE-MRIS 
Conference Code 2013-12-MR-MMS 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Deposition of Co/Pt film with perpendicular magnetic anisotropy by layer stacking sputtering 
Sub Title (in English)  
Keyword(1) Layer stacking sputter-deposition  
Keyword(2) Collimated sputtering  
Keyword(3) Ordered CoPt film  
Keyword(4) Perpendicular magnetic anisotropy  
Keyword(5) Low temperature deposition  
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1st Author's Name Taruho Tsuchiya  
1st Author's Affiliation Tohoku Institute of Technology (Tohoku Inst. Tech.)
2nd Author's Name Naoki Honda  
2nd Author's Affiliation Tohoku Institute of Technology (Tohoku Inst. Tech.)
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Speaker
Date Time 2013-12-12 16:15:00 
Presentation Time 30 
Registration for IEICE-MRIS 
Paper #  
Volume (vol) ITE-37 
Number (no)  
Page  
#Pages ITE- 
Date of Issue  


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