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Paper Abstract and Keywords
Presentation 2014-03-14 12:00
Three-dimensional Structures for High Saturation Signals and Crosstalk Suppression in 1.20 um Pixel Back-Illuminated CMOS Image Sensor
Takekazu Shinohara, Kazufumi Watanabe (Sony Semiconductor), Takashi Abe, Kazunobu Ohta (Sony), Hajime Nakayama (Sony Semiconductor), Takafumi Morikawa, Keiichi Ohno (Sony), Dai Sugimoto (Sony Semiconductor), Shingo Kadomura, Teruo Hirayama (Sony)
Abstract (in Japanese) (See Japanese page) 
(in English) We propose two technologies, vertical transfer gate (VTG) and buried shielding metal (BSM), that can be applied to 1.20 μm pixel back-illuminated CMOS image sensor (BI-CIS). With the VTG and BSM, the new pixel design exhibited 60% higher saturation signals and 50% lower crosstalk at wide chief ray angle (CRA). Even though both technologies have a three-dimensional structure formed on Si substrate, our process technology enabled them to be applied without increasing white blemish count or dark current degradation.
Keyword (in Japanese) (See Japanese page) 
(in English) CMOS image sensor / Back-illuminated CIS / three-dimensional structure / saturation signals / crosstalk / VTG / BSM /  
Reference Info. ITE Tech. Rep., vol. 38, no. 15, IST2014-10, pp. 7-10, March 2014.
Paper # IST2014-10 
Date of Issue 2014-03-07 (IST) 
ISSN Print edition: ISSN 1342-6893
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Conference Information
Committee IST  
Conference Date 2014-03-14 - 2014-03-14 
Place (in Japanese) (See Japanese page) 
Place (in English) NHK 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To IST 
Conference Code 2014-03-IST 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Three-dimensional Structures for High Saturation Signals and Crosstalk Suppression in 1.20 um Pixel Back-Illuminated CMOS Image Sensor 
Sub Title (in English)  
Keyword(1) CMOS image sensor  
Keyword(2) Back-illuminated CIS  
Keyword(3) three-dimensional structure  
Keyword(4) saturation signals  
Keyword(5) crosstalk  
Keyword(6) VTG  
Keyword(7) BSM  
Keyword(8)  
1st Author's Name Takekazu Shinohara  
1st Author's Affiliation Sony Semiconductor Corporation (Sony Semiconductor)
2nd Author's Name Kazufumi Watanabe  
2nd Author's Affiliation Sony Semiconductor Corporation (Sony Semiconductor)
3rd Author's Name Takashi Abe  
3rd Author's Affiliation Sony Corporation (Sony)
4th Author's Name Kazunobu Ohta  
4th Author's Affiliation Sony Corporation (Sony)
5th Author's Name Hajime Nakayama  
5th Author's Affiliation Sony Semiconductor Corporation (Sony Semiconductor)
6th Author's Name Takafumi Morikawa  
6th Author's Affiliation Sony Corporation (Sony)
7th Author's Name Keiichi Ohno  
7th Author's Affiliation Sony Corporation (Sony)
8th Author's Name Dai Sugimoto  
8th Author's Affiliation Sony Semiconductor Corporation (Sony Semiconductor)
9th Author's Name Shingo Kadomura  
9th Author's Affiliation Sony Corporation (Sony)
10th Author's Name Teruo Hirayama  
10th Author's Affiliation Sony Corporation (Sony)
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Speaker Author-3 
Date Time 2014-03-14 12:00:00 
Presentation Time 30 minutes 
Registration for IST 
Paper # IST2014-10 
Volume (vol) vol.38 
Number (no) no.15 
Page pp.7-10 
#Pages 4 
Date of Issue 2014-03-07 (IST) 

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