| Paper Abstract and Keywords |
| Presentation |
2014-03-14 12:00
Three-dimensional Structures for High Saturation Signals and Crosstalk Suppression in 1.20 um Pixel Back-Illuminated CMOS Image Sensor
Takekazu Shinohara, Kazufumi Watanabe (Sony Semiconductor), Takashi Abe, Kazunobu Ohta (Sony), Hajime Nakayama (Sony Semiconductor), Takafumi Morikawa, Keiichi Ohno (Sony), Dai Sugimoto (Sony Semiconductor), Shingo Kadomura, Teruo Hirayama (Sony) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
We propose two technologies, vertical transfer gate (VTG) and buried shielding metal (BSM), that can be applied to 1.20 μm pixel back-illuminated CMOS image sensor (BI-CIS). With the VTG and BSM, the new pixel design exhibited 60% higher saturation signals and 50% lower crosstalk at wide chief ray angle (CRA). Even though both technologies have a three-dimensional structure formed on Si substrate, our process technology enabled them to be applied without increasing white blemish count or dark current degradation. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
CMOS image sensor / Back-illuminated CIS / three-dimensional structure / saturation signals / crosstalk / VTG / BSM / |
| Reference Info. |
ITE Tech. Rep., vol. 38, no. 15, IST2014-10, pp. 7-10, March 2014. |
| Paper # |
IST2014-10 |
| Date of Issue |
2014-03-07 (IST) |
| ISSN |
Print edition: ISSN 1342-6893 |
| Download PDF |
|
| Conference Information |
| Committee |
IST |
| Conference Date |
2014-03-14 - 2014-03-14 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
NHK |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
|
| Paper Information |
| Registration To |
IST |
| Conference Code |
2014-03-IST |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Three-dimensional Structures for High Saturation Signals and Crosstalk Suppression in 1.20 um Pixel Back-Illuminated CMOS Image Sensor |
| Sub Title (in English) |
|
| Keyword(1) |
CMOS image sensor |
| Keyword(2) |
Back-illuminated CIS |
| Keyword(3) |
three-dimensional structure |
| Keyword(4) |
saturation signals |
| Keyword(5) |
crosstalk |
| Keyword(6) |
VTG |
| Keyword(7) |
BSM |
| Keyword(8) |
|
| 1st Author's Name |
Takekazu Shinohara |
| 1st Author's Affiliation |
Sony Semiconductor Corporation (Sony Semiconductor) |
| 2nd Author's Name |
Kazufumi Watanabe |
| 2nd Author's Affiliation |
Sony Semiconductor Corporation (Sony Semiconductor) |
| 3rd Author's Name |
Takashi Abe |
| 3rd Author's Affiliation |
Sony Corporation (Sony) |
| 4th Author's Name |
Kazunobu Ohta |
| 4th Author's Affiliation |
Sony Corporation (Sony) |
| 5th Author's Name |
Hajime Nakayama |
| 5th Author's Affiliation |
Sony Semiconductor Corporation (Sony Semiconductor) |
| 6th Author's Name |
Takafumi Morikawa |
| 6th Author's Affiliation |
Sony Corporation (Sony) |
| 7th Author's Name |
Keiichi Ohno |
| 7th Author's Affiliation |
Sony Corporation (Sony) |
| 8th Author's Name |
Dai Sugimoto |
| 8th Author's Affiliation |
Sony Semiconductor Corporation (Sony Semiconductor) |
| 9th Author's Name |
Shingo Kadomura |
| 9th Author's Affiliation |
Sony Corporation (Sony) |
| 10th Author's Name |
Teruo Hirayama |
| 10th Author's Affiliation |
Sony Corporation (Sony) |
| 11th Author's Name |
|
| 11th Author's Affiliation |
() |
| 12th Author's Name |
|
| 12th Author's Affiliation |
() |
| 13th Author's Name |
|
| 13th Author's Affiliation |
() |
| 14th Author's Name |
|
| 14th Author's Affiliation |
() |
| 15th Author's Name |
|
| 15th Author's Affiliation |
() |
| 16th Author's Name |
|
| 16th Author's Affiliation |
() |
| 17th Author's Name |
|
| 17th Author's Affiliation |
() |
| 18th Author's Name |
|
| 18th Author's Affiliation |
() |
| 19th Author's Name |
|
| 19th Author's Affiliation |
() |
| 20th Author's Name |
|
| 20th Author's Affiliation |
() |
| 21st Author's Name |
|
| 21st Author's Affiliation |
() |
| 22nd Author's Name |
|
| 22nd Author's Affiliation |
() |
| 23rd Author's Name |
|
| 23rd Author's Affiliation |
() |
| 24th Author's Name |
|
| 24th Author's Affiliation |
() |
| 25th Author's Name |
|
| 25th Author's Affiliation |
() |
| 26th Author's Name |
/ / |
| 26th Author's Affiliation |
()
() |
| 27th Author's Name |
/ / |
| 27th Author's Affiliation |
()
() |
| 28th Author's Name |
/ / |
| 28th Author's Affiliation |
()
() |
| 29th Author's Name |
/ / |
| 29th Author's Affiliation |
()
() |
| 30th Author's Name |
/ / |
| 30th Author's Affiliation |
()
() |
| 31st Author's Name |
/ / |
| 31st Author's Affiliation |
()
() |
| 32nd Author's Name |
/ / |
| 32nd Author's Affiliation |
()
() |
| 33rd Author's Name |
/ / |
| 33rd Author's Affiliation |
()
() |
| 34th Author's Name |
/ / |
| 34th Author's Affiliation |
()
() |
| 35th Author's Name |
/ / |
| 35th Author's Affiliation |
()
() |
| 36th Author's Name |
/ / |
| 36th Author's Affiliation |
()
() |
| Speaker |
Author-3 |
| Date Time |
2014-03-14 12:00:00 |
| Presentation Time |
30 minutes |
| Registration for |
IST |
| Paper # |
IST2014-10 |
| Volume (vol) |
vol.38 |
| Number (no) |
no.15 |
| Page |
pp.7-10 |
| #Pages |
4 |
| Date of Issue |
2014-03-07 (IST) |