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Paper Abstract and Keywords
Presentation 2015-09-18 15:40
Investigation of Implantation Damage Recovery using Microwave Annealing for High Performance Image Sensing Devices.
Masatoshi Kimura (RSMC), Tadashi Yamaguchi (Renesas Electronics), Takashi Kuroi (RSMC)
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Reference Info. ITE Tech. Rep., vol. 39, no. 35, IST2015-54, pp. 45-48, Sept. 2015.
Paper # IST2015-54 
Date of Issue 2015-09-11 (IST) 
ISSN Print edition: ISSN 1342-6893  Online edition: ISSN 2424-1970
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Conference Information
Committee IST  
Conference Date 2015-09-18 - 2015-09-18 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To IST 
Conference Code 2015-09-IST 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Investigation of Implantation Damage Recovery using Microwave Annealing for High Performance Image Sensing Devices. 
Sub Title (in English)  
1st Author's Name Masatoshi Kimura  
1st Author's Affiliation Renesas Semiconductor Manufacturing Co.,Ltd. (RSMC)
2nd Author's Name Tadashi Yamaguchi  
2nd Author's Affiliation Renesas Electronics Corporation (Renesas Electronics)
3rd Author's Name Takashi Kuroi  
3rd Author's Affiliation Renesas Semiconductor Manufacturing Co.,Ltd. (RSMC)
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Date Time 2015-09-18 15:40:00 
Presentation Time 30 
Registration for IST 
Paper # IST2015-54 
Volume (vol) vol.39 
Number (no) no.35 
Page pp.45-48 
Date of Issue 2015-09-11 (IST) 

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