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Paper Abstract and Keywords
Presentation 2018-03-08 15:00
[Invited Lecture] Photo-Induced Transient Spectroscopy Study on Hydrogen-Related Trap States in a-IGZO-TFTs induced during TFT Fabrication Process
Kazushi Hayashi, Mototaka Ochi, Aya Hino, Hiroshi Goto, Toshihiro Kugimiya (Kobe Steel)
Abstract (in Japanese) (See Japanese page) 
(in English) Hydrogen-related trap states induced during a-IGZO TFT fabrication process were examined. The a-IGZO TFTs with various ESL deposition conditions were examined by means of photo-induced transient spectroscopy (PITS). The PITS measurements revealed that, as the flow rate of SiH4/N2O, the position of the peak changed from 110 to 160 K in the PITS spectra. Accordingly, a monotonous increase in width was observed. These results were successfully correlated with the threshold voltage shift originating from positive bias thermal and negative bias thermal illumination stresses.
Keyword (in Japanese) (See Japanese page) 
(in English) Amorphous In-Ga-Zn-O / Trap states / Thin-film transistor / Photo-induced transient spectroscopy / / / /  
Reference Info. ITE Tech. Rep., vol. 42, no. 8, IDY2018-19, pp. 21-26, March 2018.
Paper # IDY2018-19 
Date of Issue 2018-03-01 (IDY) 
ISSN Print edition: ISSN 1342-6893  Online edition: ISSN 2424-1970
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Conference Information
Committee IDY  
Conference Date 2018-03-08 - 2018-03-08 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To IDY 
Conference Code 2018-03-IDY 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Photo-Induced Transient Spectroscopy Study on Hydrogen-Related Trap States in a-IGZO-TFTs induced during TFT Fabrication Process 
Sub Title (in English)  
Keyword(1) Amorphous In-Ga-Zn-O  
Keyword(2) Trap states  
Keyword(3) Thin-film transistor  
Keyword(4) Photo-induced transient spectroscopy  
1st Author's Name Kazushi Hayashi  
1st Author's Affiliation Kobe Steel, Ltd. (Kobe Steel)
2nd Author's Name Mototaka Ochi  
2nd Author's Affiliation Kobe Steel, Ltd. (Kobe Steel)
3rd Author's Name Aya Hino  
3rd Author's Affiliation Kobe Steel, Ltd. (Kobe Steel)
4th Author's Name Hiroshi Goto  
4th Author's Affiliation Kobe Steel, Ltd. (Kobe Steel)
5th Author's Name Toshihiro Kugimiya  
5th Author's Affiliation Kobe Steel, Ltd. (Kobe Steel)
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Date Time 2018-03-08 15:00:00 
Presentation Time 25 
Registration for IDY 
Paper # ITE-IDY2018-19 
Volume (vol) ITE-42 
Number (no) no.8 
Page pp.21-26 
#Pages ITE-6 
Date of Issue ITE-IDY-2018-03-01 

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