| Paper Abstract and Keywords |
| Presentation |
2018-03-08 15:00
[Invited Lecture]
Photo-Induced Transient Spectroscopy Study on Hydrogen-Related Trap States in a-IGZO-TFTs induced during TFT Fabrication Process
Kazushi Hayashi, Mototaka Ochi, Aya Hino, Hiroshi Goto, Toshihiro Kugimiya (Kobe Steel) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
Hydrogen-related trap states induced during a-IGZO TFT fabrication process were examined. The a-IGZO TFTs with various ESL deposition conditions were examined by means of photo-induced transient spectroscopy (PITS). The PITS measurements revealed that, as the flow rate of SiH4/N2O, the position of the peak changed from 110 to 160 K in the PITS spectra. Accordingly, a monotonous increase in width was observed. These results were successfully correlated with the threshold voltage shift originating from positive bias thermal and negative bias thermal illumination stresses. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
Amorphous In-Ga-Zn-O / Trap states / Thin-film transistor / Photo-induced transient spectroscopy / / / / |
| Reference Info. |
ITE Tech. Rep., vol. 42, no. 8, IDY2018-19, pp. 21-26, March 2018. |
| Paper # |
IDY2018-19 |
| Date of Issue |
2018-03-01 (IDY) |
| ISSN |
Print edition: ISSN 1342-6893 Online edition: ISSN 2424-1970 |
| Download PDF |
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| Conference Information |
| Committee |
IDY |
| Conference Date |
2018-03-08 - 2018-03-08 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
|
| Paper Information |
| Registration To |
IDY |
| Conference Code |
2018-03-IDY |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Photo-Induced Transient Spectroscopy Study on Hydrogen-Related Trap States in a-IGZO-TFTs induced during TFT Fabrication Process |
| Sub Title (in English) |
|
| Keyword(1) |
Amorphous In-Ga-Zn-O |
| Keyword(2) |
Trap states |
| Keyword(3) |
Thin-film transistor |
| Keyword(4) |
Photo-induced transient spectroscopy |
| Keyword(5) |
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| Keyword(6) |
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| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Kazushi Hayashi |
| 1st Author's Affiliation |
Kobe Steel, Ltd. (Kobe Steel) |
| 2nd Author's Name |
Mototaka Ochi |
| 2nd Author's Affiliation |
Kobe Steel, Ltd. (Kobe Steel) |
| 3rd Author's Name |
Aya Hino |
| 3rd Author's Affiliation |
Kobe Steel, Ltd. (Kobe Steel) |
| 4th Author's Name |
Hiroshi Goto |
| 4th Author's Affiliation |
Kobe Steel, Ltd. (Kobe Steel) |
| 5th Author's Name |
Toshihiro Kugimiya |
| 5th Author's Affiliation |
Kobe Steel, Ltd. (Kobe Steel) |
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| Speaker |
Author-1 |
| Date Time |
2018-03-08 15:00:00 |
| Presentation Time |
25 minutes |
| Registration for |
IDY |
| Paper # |
IDY2018-19 |
| Volume (vol) |
vol.42 |
| Number (no) |
no.8 |
| Page |
pp.21-26 |
| #Pages |
6 |
| Date of Issue |
2018-03-01 (IDY) |