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Paper Abstract and Keywords
Presentation 2018-03-09 15:10
Single-crystalline GeSn Photodiode Array on Quartz Substrate for Back-side Illuminated Near-infrared Image Sensor
Hiroshi Oka, Keitaro Inoue (Osaka Univ.), Thi Thuy Nguyen, Shin-Ichiro Kuroki (Hiroshima Univ.), Takuji Hosoi, Takayoshi Shimura, Heiji Watanabe (Osaka Univ.)
Abstract (in Japanese) (See Japanese page) 
(in English) Imaging and sensing using near-infrared (NIR) light with a wavelength of 2-5 um have attracted a great interest due to its various applications including night vision, environmental monitoring, and biochemical sensing. GeSn alloy is a promising group-IV mixed crystal for NIR photodetection due to its tunable bandgap and extended cut-off wavelength (>1.55 um) depending on Sn content. In this work, we have fabricated single-crystalline GeSn photodiode array on a quartz substrate by novel laser-induced liquid-phase crystallization technique. Thanks to high transparency of quartz to the NIR light, a quantum yield of 100% at a wavelength of 1.55 um was obtained by back-side illumination. The present technology enables monolithically integrated group-IV-based back-side illuminated NIR image sensor.
Keyword (in Japanese) (See Japanese page) 
(in English) GeSn / Sensor array / Quartz substrate / Near-infrared photodetection / Back-side illumination / / /  
Reference Info. ITE Tech. Rep., vol. 42, no. 10, IST2018-22, pp. 47-50, March 2018.
Paper # IST2018-22 
Date of Issue 2018-03-02 (IST) 
ISSN Print edition: ISSN 1342-6893    Online edition: ISSN 2424-1970
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Conference Information
Committee IST  
Conference Date 2018-03-09 - 2018-03-09 
Place (in Japanese) (See Japanese page) 
Place (in English) NHK Housou-Gijyutu Lab. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Image Sensors, etc. 
Paper Information
Registration To IST 
Conference Code 2018-03-IST 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Single-crystalline GeSn Photodiode Array on Quartz Substrate for Back-side Illuminated Near-infrared Image Sensor 
Sub Title (in English)  
Keyword(1) GeSn  
Keyword(2) Sensor array  
Keyword(3) Quartz substrate  
Keyword(4) Near-infrared photodetection  
Keyword(5) Back-side illumination  
1st Author's Name Hiroshi Oka  
1st Author's Affiliation Osaka University (Osaka Univ.)
2nd Author's Name Keitaro Inoue  
2nd Author's Affiliation Osaka University (Osaka Univ.)
3rd Author's Name Thi Thuy Nguyen  
3rd Author's Affiliation Hiroshima University (Hiroshima Univ.)
4th Author's Name Shin-Ichiro Kuroki  
4th Author's Affiliation Hiroshima University (Hiroshima Univ.)
5th Author's Name Takuji Hosoi  
5th Author's Affiliation Osaka University (Osaka Univ.)
6th Author's Name Takayoshi Shimura  
6th Author's Affiliation Osaka University (Osaka Univ.)
7th Author's Name Heiji Watanabe  
7th Author's Affiliation Osaka University (Osaka Univ.)
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Speaker Author-1 
Date Time 2018-03-09 15:10:00 
Presentation Time 20 minutes 
Registration for IST 
Paper # IST2018-22 
Volume (vol) vol.42 
Number (no) no.10 
Page pp.47-50 
Date of Issue 2018-03-02 (IST) 

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