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Paper Abstract and Keywords
Presentation 2019-06-18 14:40
Measurement of gas concentration distribution in vacuum chamber using high SN ratio absorption imaging
Keigo Takahashi, Yhang Ricardo Sipauba Carvalho da Silva, Naoki Numao, Rihito Kuroda, Yasuyuki Fujihara, Maasa Murata, Hidekazu Ishii, Tatsuo Morimoto, Tomoyuki Suwa, Akinobu Teramoto, Shigetoshi Sugawa (Tohoku Univ.)
Abstract (in Japanese) (See Japanese page) 
(in English) This paper reports gas concentration absorption imaging in a vacuum chamber using a LOFIC CMOS image sensor with high signal-to-noise ratio (SNR) and high sensitivity and high reliability in the ultraviolet wavelength band. The image sensor used for the measurement achieved 71.3dB SNR, 24.3M e- FWC, 190-1000nm spectral sensitivity, with very high quantum efficiency. Using this image sensor and a 405 nm LED light source, a two-dimensional absorption image of NO2 gas concentration in the vacuum chamber was obtained. As a result, a good calibration curve contributing to real time measurement of concentration distribution was obtained with NO2 gas.
Keyword (in Japanese) (See Japanese page) 
(in English) Spectral imaging / Concentration sensor / Absorption spectrometry / CMOS image sensor / / / /  
Reference Info. ITE Tech. Rep., vol. 43, no. 18, IST2019-37, pp. 11-14, June 2019.
Paper # IST2019-37 
Date of Issue 2019-06-11 (IST) 
ISSN Print edition: ISSN 1342-6893  Online edition: ISSN 2424-1970
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Conference Information
Committee IST  
Conference Date 2019-06-18 - 2019-06-18 
Place (in Japanese) (See Japanese page) 
Place (in English) Tokyo University of Sci. Morito Kinenkan 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To IST 
Conference Code 2019-06-IST 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Measurement of gas concentration distribution in vacuum chamber using high SN ratio absorption imaging 
Sub Title (in English)  
Keyword(1) Spectral imaging  
Keyword(2) Concentration sensor  
Keyword(3) Absorption spectrometry  
Keyword(4) CMOS image sensor  
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1st Author's Name Keigo Takahashi  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
2nd Author's Name Yhang Ricardo Sipauba Carvalho da Silva  
2nd Author's Affiliation Tohoku University (Tohoku Univ.)
3rd Author's Name Naoki Numao  
3rd Author's Affiliation Tohoku University (Tohoku Univ.)
4th Author's Name Rihito Kuroda  
4th Author's Affiliation Tohoku University (Tohoku Univ.)
5th Author's Name Yasuyuki Fujihara  
5th Author's Affiliation Tohoku University (Tohoku Univ.)
6th Author's Name Maasa Murata  
6th Author's Affiliation Tohoku University (Tohoku Univ.)
7th Author's Name Hidekazu Ishii  
7th Author's Affiliation Tohoku University (Tohoku Univ.)
8th Author's Name Tatsuo Morimoto  
8th Author's Affiliation Tohoku University (Tohoku Univ.)
9th Author's Name Tomoyuki Suwa  
9th Author's Affiliation Tohoku University (Tohoku Univ.)
10th Author's Name Akinobu Teramoto  
10th Author's Affiliation Tohoku University (Tohoku Univ.)
11th Author's Name Shigetoshi Sugawa  
11th Author's Affiliation Tohoku University (Tohoku Univ.)
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Speaker
Date Time 2019-06-18 14:40:00 
Presentation Time 30 
Registration for IST 
Paper # ITE-IST2019-37 
Volume (vol) ITE-43 
Number (no) no.18 
Page pp.11-14 
#Pages ITE-4 
Date of Issue ITE-IST-2019-06-11 


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