| Paper Abstract and Keywords |
| Presentation |
2019-06-18 14:40
Measurement of gas concentration distribution in vacuum chamber using high SN ratio absorption imaging
Keigo Takahashi, Yhang Ricardo Sipauba Carvalho da Silva, Naoki Numao, Rihito Kuroda, Yasuyuki Fujihara, Maasa Murata, Hidekazu Ishii, Tatsuo Morimoto, Tomoyuki Suwa, Akinobu Teramoto, Shigetoshi Sugawa (Tohoku Univ.) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
This paper reports gas concentration absorption imaging in a vacuum chamber using a LOFIC CMOS image sensor with high signal-to-noise ratio (SNR) and high sensitivity and high reliability in the ultraviolet wavelength band. The image sensor used for the measurement achieved 71.3dB SNR, 24.3M e- FWC, 190-1000nm spectral sensitivity, with very high quantum efficiency. Using this image sensor and a 405 nm LED light source, a two-dimensional absorption image of NO2 gas concentration in the vacuum chamber was obtained. As a result, a good calibration curve contributing to real time measurement of concentration distribution was obtained with NO2 gas. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
Spectral imaging / Concentration sensor / Absorption spectrometry / CMOS image sensor / / / / |
| Reference Info. |
ITE Tech. Rep., vol. 43, no. 18, IST2019-37, pp. 11-14, June 2019. |
| Paper # |
IST2019-37 |
| Date of Issue |
2019-06-11 (IST) |
| ISSN |
Print edition: ISSN 1342-6893 Online edition: ISSN 2424-1970 |
| Download PDF |
|