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Paper Abstract and Keywords
Presentation 2019-12-24 14:05
Ga-Sn-O TFT fabricated on Al2O3 insulating film
Kazuki Hattori, Kenta Tanino, Tokiyoshi Matsuda, Mutsumi Kimura (Ryukoku Univ), Toshiyuki Kawaharamura, Li Liu (Kochi Univ of Tech)
Abstract (in Japanese) (See Japanese page) 
(in English) We compared the characteristics of Ga-Sn-O Thin Film Transistors (GTO TFTs) with and without an Al2O3 film by mist Chemical Vapor Deposition (mist CVD) method as an insulator layer.
As a result, high mobility was obtained from the GTO TFT on the Al2O3 insulating film.
This result suggests the possibility of further improvement of GTO TFT characteristics.
Keyword (in Japanese) (See Japanese page) 
(in English) mist Chemical Vapor Deposition (mist CVD) / Al2O3 / Ga-Sn-O (GTO) / Thin-Film Transistor (TFT) / / / /  
Reference Info. ITE Tech. Rep., vol. 43, no. 44, IDY2019-70, pp. 9-12, Dec. 2019.
Paper # IDY2019-70 
Date of Issue 2019-12-17 (IDY) 
ISSN Print edition: ISSN 1342-6893  Online edition: ISSN 2424-1970
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Conference Information
Committee IEICE-SDM IEICE-EID IDY  
Conference Date 2019-12-24 - 2019-12-24 
Place (in Japanese) (See Japanese page) 
Place (in English) NAIST 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Semiconductor Material Process and Device Meeting 
Paper Information
Registration To IDY 
Conference Code 2019-12-SDM-EID-IDY 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Ga-Sn-O TFT fabricated on Al2O3 insulating film 
Sub Title (in English)  
Keyword(1) mist Chemical Vapor Deposition (mist CVD)  
Keyword(2) Al2O3  
Keyword(3) Ga-Sn-O (GTO)  
Keyword(4) Thin-Film Transistor (TFT)  
Keyword(5)  
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1st Author's Name Kazuki Hattori  
1st Author's Affiliation Ryukoku University (Ryukoku Univ)
2nd Author's Name Kenta Tanino  
2nd Author's Affiliation Ryukoku University (Ryukoku Univ)
3rd Author's Name Tokiyoshi Matsuda  
3rd Author's Affiliation Ryukoku University (Ryukoku Univ)
4th Author's Name Mutsumi Kimura  
4th Author's Affiliation Ryukoku University (Ryukoku Univ)
5th Author's Name Toshiyuki Kawaharamura  
5th Author's Affiliation Kochi University of Technology (Kochi Univ of Tech)
6th Author's Name Li Liu  
6th Author's Affiliation Kochi University of Technology (Kochi Univ of Tech)
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Speaker
Date Time 2019-12-24 14:05:00 
Presentation Time 20 
Registration for IDY 
Paper # ITE-IDY2019-70 
Volume (vol) ITE-43 
Number (no) no.44 
Page pp.9-12 
#Pages ITE-4 
Date of Issue ITE-IDY-2019-12-17 


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