| Paper Abstract and Keywords |
| Presentation |
2020-01-23 13:05
[Poster Presentation]
CVD growth of h-BN thin films on c-plane sapphire and Si (111) substrates
Tomoyasu Nakama, Kazuki Matsusita, Taira Watanabe, Hiroko Kominami, Kazuhiko Hara (Shizuoka Univ.) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
The hexagonal boron nitride (h-BN) thin films were grown on c-plane sapphire and Si (111) substrates by low-pressure chemical vapor deposition using BCl3 and NH3 as sources. The film grown on the Si substrate had the surface morphology similar to that on the sapphire substrate. However, it showed cathodoluminescence with improved intrinsic exciton emission, which is the first observation of intrinsic exciton emission for the h-BN films grown on Si substrate. This result leads us to expect the growth of high-quality h-BN films by the CVD with BCl3. To further improve the film properties, the heating method for substrates, the tilting angle of substrates and growth temperature were also examined. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
hexagonal boron nitride / CVD / thin film / cathodoluminescence / deep-ultraviolet luminescence / / / |
| Reference Info. |
ITE Tech. Rep., vol. 44, no. 1, IDY2020-2, pp. 1-4, Jan. 2020. |
| Paper # |
IDY2020-2 |
| Date of Issue |
2020-01-16 (IDY) |
| ISSN |
Print edition: ISSN 1342-6893 Online edition: ISSN 2424-1970 |
| Download PDF |
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| Conference Information |
| Committee |
IDY IEICE-EID IEIJ-SSL SID-JC IEE-EDD |
| Conference Date |
2020-01-23 - 2020-01-24 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Tottori Univ |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
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| Paper Information |
| Registration To |
IDY |
| Conference Code |
2020-01-IDY-EID-SSL-JC-EDD |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
CVD growth of h-BN thin films on c-plane sapphire and Si (111) substrates |
| Sub Title (in English) |
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| Keyword(1) |
hexagonal boron nitride |
| Keyword(2) |
CVD |
| Keyword(3) |
thin film |
| Keyword(4) |
cathodoluminescence |
| Keyword(5) |
deep-ultraviolet luminescence |
| Keyword(6) |
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| Keyword(7) |
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| 1st Author's Name |
Tomoyasu Nakama |
| 1st Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 2nd Author's Name |
Kazuki Matsusita |
| 2nd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 3rd Author's Name |
Taira Watanabe |
| 3rd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 4th Author's Name |
Hiroko Kominami |
| 4th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 5th Author's Name |
Kazuhiko Hara |
| 5th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2020-01-23 13:05:00 |
| Presentation Time |
5 minutes |
| Registration for |
IDY |
| Paper # |
IDY2020-2 |
| Volume (vol) |
vol.44 |
| Number (no) |
no.1 |
| Page |
pp.1-4 |
| #Pages |
4 |
| Date of Issue |
2020-01-16 (IDY) |