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Paper Abstract and Keywords
Presentation 2020-01-23 13:05
[Poster Presentation] CVD growth of h-BN thin films on c-plane sapphire and Si (111) substrates
Tomoyasu Nakama, Kazuki Matsusita, Taira Watanabe, Hiroko Kominami, Kazuhiko Hara (Shizuoka Univ.)
Abstract (in Japanese) (See Japanese page) 
(in English) The hexagonal boron nitride (h-BN) thin films were grown on c-plane sapphire and Si (111) substrates by low-pressure chemical vapor deposition using BCl3 and NH3 as sources. The film grown on the Si substrate had the surface morphology similar to that on the sapphire substrate. However, it showed cathodoluminescence with improved intrinsic exciton emission, which is the first observation of intrinsic exciton emission for the h-BN films grown on Si substrate. This result leads us to expect the growth of high-quality h-BN films by the CVD with BCl3. To further improve the film properties, the heating method for substrates, the tilting angle of substrates and growth temperature were also examined.
Keyword (in Japanese) (See Japanese page) 
(in English) hexagonal boron nitride / CVD / thin film / cathodoluminescence / deep-ultraviolet luminescence / / /  
Reference Info. ITE Tech. Rep., vol. 44, no. 1, IDY2020-2, pp. 1-4, Jan. 2020.
Paper # IDY2020-2 
Date of Issue 2020-01-16 (IDY) 
ISSN Print edition: ISSN 1342-6893    Online edition: ISSN 2424-1970
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Conference Information
Conference Date 2020-01-23 - 2020-01-24 
Place (in Japanese) (See Japanese page) 
Place (in English) Tottori Univ 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To IDY 
Conference Code 2020-01-IDY-EID-SSL-JC-EDD 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) CVD growth of h-BN thin films on c-plane sapphire and Si (111) substrates 
Sub Title (in English)  
Keyword(1) hexagonal boron nitride  
Keyword(2) CVD  
Keyword(3) thin film  
Keyword(4) cathodoluminescence  
Keyword(5) deep-ultraviolet luminescence  
1st Author's Name Tomoyasu Nakama  
1st Author's Affiliation Shizuoka University (Shizuoka Univ.)
2nd Author's Name Kazuki Matsusita  
2nd Author's Affiliation Shizuoka University (Shizuoka Univ.)
3rd Author's Name Taira Watanabe  
3rd Author's Affiliation Shizuoka University (Shizuoka Univ.)
4th Author's Name Hiroko Kominami  
4th Author's Affiliation Shizuoka University (Shizuoka Univ.)
5th Author's Name Kazuhiko Hara  
5th Author's Affiliation Shizuoka University (Shizuoka Univ.)
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Speaker Author-1 
Date Time 2020-01-23 13:05:00 
Presentation Time 5 minutes 
Registration for IDY 
Paper # IDY2020-2 
Volume (vol) vol.44 
Number (no) no.1 
Page pp.1-4 
Date of Issue 2020-01-16 (IDY) 

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