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Presentation 2020-01-23 13:15
[Poster Presentation] Investigation of growth conditions of flat ZnO thin films by atomic layer deposition
Ryo Yamamoto, Hiroto Kano, Atsushi Nakamura, Wataru Inami (Shizuoka Univ.)
Abstract (in Japanese) (See Japanese page) 
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Reference Info. ITE Tech. Rep., vol. 44, no. 1, IDY2020-4, pp. 9-12, Jan. 2020.
Paper # IDY2020-4 
Date of Issue 2020-01-16 (IDY) 
ISSN Print edition: ISSN 1342-6893    Online edition: ISSN 2424-1970
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Conference Information
Committee IDY IEICE-EID IEIJ-SSL SID-JC IEE-EDD  
Conference Date 2020-01-23 - 2020-01-24 
Place (in Japanese) (See Japanese page) 
Place (in English) Tottori Univ 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To IDY 
Conference Code 2020-01-IDY-EID-SSL-JC-EDD 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Investigation of growth conditions of flat ZnO thin films by atomic layer deposition 
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1st Author's Name Ryo Yamamoto  
1st Author's Affiliation Shizuoka University (Shizuoka Univ.)
2nd Author's Name Hiroto Kano  
2nd Author's Affiliation Shizuoka University (Shizuoka Univ.)
3rd Author's Name Atsushi Nakamura  
3rd Author's Affiliation Shizuoka University (Shizuoka Univ.)
4th Author's Name Wataru Inami  
4th Author's Affiliation Shizuoka University (Shizuoka Univ.)
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Date Time 2020-01-23 13:15:00 
Presentation Time 5 minutes 
Registration for IDY 
Paper # IDY2020-4 
Volume (vol) vol.44 
Number (no) no.1 
Page pp.9-12 
#Pages
Date of Issue 2020-01-16 (IDY) 


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