| Paper Abstract and Keywords |
| Presentation |
2020-07-01 13:30
Fabrication of Large-Size and High-Uniformity Thin Composite Emission Filter for Lens-Free Fluorescent Imager
Erus Rustami, Kiyotaka Sasagawa, Thanet Pakpuwadon, Yasumi Ohta, Hironari Takehara, Makito Haruta, Jun Ohta (NAIST) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
We report a composite emission filter fabrication using laser lift-off (LLO) and plasma etching method. The LLO used a high energy laser to separates filter from its substrate, whereas a SiF6 plasma etched silicon-substrate whereby the filter was deposited beforehand. As a result, spotless composite filters are successfully assembled in a micrometer-sized image sensor by LLO, yet the filter crack issue remains unsolved for large sensors. Conversely, the plasma etching produced large-size and spotless filters with relatively high reproducibility. This large-area etching capability, down to a centimeter range, can then be efficiently used for a multiple lens-free fluorescent device fabrication. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
Lens-free imaging / Interference filter / Absorption filter / Laser lift-off / Plasma etching / / / |
| Reference Info. |
ITE Tech. Rep., vol. 44, no. 14, IST2020-34, pp. 1-5, July 2020. |
| Paper # |
IST2020-34 |
| Date of Issue |
2020-06-24 (IST) |
| ISSN |
Print edition: ISSN 1342-6893 Online edition: ISSN 2424-1970 |
| Download PDF |
|
| Conference Information |
| Committee |
IST |
| Conference Date |
2020-07-01 - 2020-07-01 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Online |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
|
| Paper Information |
| Registration To |
IST |
| Conference Code |
2020-07-IST |
| Language |
English |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Fabrication of Large-Size and High-Uniformity Thin Composite Emission Filter for Lens-Free Fluorescent Imager |
| Sub Title (in English) |
|
| Keyword(1) |
Lens-free imaging |
| Keyword(2) |
Interference filter |
| Keyword(3) |
Absorption filter |
| Keyword(4) |
Laser lift-off |
| Keyword(5) |
Plasma etching |
| Keyword(6) |
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| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Erus Rustami |
| 1st Author's Affiliation |
Nara Institute of Science and Technology (NAIST) |
| 2nd Author's Name |
Kiyotaka Sasagawa |
| 2nd Author's Affiliation |
Nara Institute of Science and Technology (NAIST) |
| 3rd Author's Name |
Thanet Pakpuwadon |
| 3rd Author's Affiliation |
Nara Institute of Science and Technology (NAIST) |
| 4th Author's Name |
Yasumi Ohta |
| 4th Author's Affiliation |
Nara Institute of Science and Technology (NAIST) |
| 5th Author's Name |
Hironari Takehara |
| 5th Author's Affiliation |
Nara Institute of Science and Technology (NAIST) |
| 6th Author's Name |
Makito Haruta |
| 6th Author's Affiliation |
Nara Institute of Science and Technology (NAIST) |
| 7th Author's Name |
Jun Ohta |
| 7th Author's Affiliation |
Nara Institute of Science and Technology (NAIST) |
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| Speaker |
Author-1 |
| Date Time |
2020-07-01 13:30:00 |
| Presentation Time |
30 minutes |
| Registration for |
IST |
| Paper # |
IST2020-34 |
| Volume (vol) |
vol.44 |
| Number (no) |
no.14 |
| Page |
pp.1-5 |
| #Pages |
5 |
| Date of Issue |
2020-06-24 (IST) |