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Paper Abstract and Keywords
Presentation 2020-07-01 13:30
Fabrication of Large-Size and High-Uniformity Thin Composite Emission Filter for Lens-Free Fluorescent Imager
Erus Rustami, Kiyotaka Sasagawa, Thanet Pakpuwadon, Yasumi Ohta, Hironari Takehara, Makito Haruta, Jun Ohta (NAIST)
Abstract (in Japanese) (See Japanese page) 
(in English) We report a composite emission filter fabrication using laser lift-off (LLO) and plasma etching method. The LLO used a high energy laser to separates filter from its substrate, whereas a SiF6 plasma etched silicon-substrate whereby the filter was deposited beforehand. As a result, spotless composite filters are successfully assembled in a micrometer-sized image sensor by LLO, yet the filter crack issue remains unsolved for large sensors. Conversely, the plasma etching produced large-size and spotless filters with relatively high reproducibility. This large-area etching capability, down to a centimeter range, can then be efficiently used for a multiple lens-free fluorescent device fabrication.
Keyword (in Japanese) (See Japanese page) 
(in English) Lens-free imaging / Interference filter / Absorption filter / Laser lift-off / Plasma etching / / /  
Reference Info. ITE Tech. Rep., vol. 44, no. 14, IST2020-34, pp. 1-5, July 2020.
Paper # IST2020-34 
Date of Issue 2020-06-24 (IST) 
ISSN Print edition: ISSN 1342-6893    Online edition: ISSN 2424-1970
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Conference Information
Committee IST  
Conference Date 2020-07-01 - 2020-07-01 
Place (in Japanese) (See Japanese page) 
Place (in English) Online 
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Paper Information
Registration To IST 
Conference Code 2020-07-IST 
Language English 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication of Large-Size and High-Uniformity Thin Composite Emission Filter for Lens-Free Fluorescent Imager 
Sub Title (in English)  
Keyword(1) Lens-free imaging  
Keyword(2) Interference filter  
Keyword(3) Absorption filter  
Keyword(4) Laser lift-off  
Keyword(5) Plasma etching  
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1st Author's Name Erus Rustami  
1st Author's Affiliation Nara Institute of Science and Technology (NAIST)
2nd Author's Name Kiyotaka Sasagawa  
2nd Author's Affiliation Nara Institute of Science and Technology (NAIST)
3rd Author's Name Thanet Pakpuwadon  
3rd Author's Affiliation Nara Institute of Science and Technology (NAIST)
4th Author's Name Yasumi Ohta  
4th Author's Affiliation Nara Institute of Science and Technology (NAIST)
5th Author's Name Hironari Takehara  
5th Author's Affiliation Nara Institute of Science and Technology (NAIST)
6th Author's Name Makito Haruta  
6th Author's Affiliation Nara Institute of Science and Technology (NAIST)
7th Author's Name Jun Ohta  
7th Author's Affiliation Nara Institute of Science and Technology (NAIST)
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Speaker Author-1 
Date Time 2020-07-01 13:30:00 
Presentation Time 30 minutes 
Registration for IST 
Paper # IST2020-34 
Volume (vol) vol.44 
Number (no) no.14 
Page pp.1-5 
#Pages 5 
Date of Issue 2020-06-24 (IST) 

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