ITE Technical Group Submission System
Conference Paper's Information
Online Proceedings
[Sign in]
 Go Top Page Go Previous   [Japanese] / [English] 

Paper Abstract and Keywords
Presentation 2020-07-01 13:30
Fabrication of Large-Size and High-Uniformity Thin Composite Emission Filter for Lens-Free Fluorescent Imager
Erus Rustami, Kiyotaka Sasagawa, Thanet Pakpuwadon, Yasumi Ohta, Hironari Takehara, Makito Haruta, Jun Ohta (NAIST)
Abstract (in Japanese) (See Japanese page) 
(in English) We report a composite emission filter fabrication using laser lift-off (LLO) and plasma etching method. The LLO used a high energy laser to separates filter from its substrate, whereas a SiF6 plasma etched silicon-substrate whereby the filter was deposited beforehand. As a result, spotless composite filters are successfully assembled in a micrometer-sized image sensor by LLO, yet the filter crack issue remains unsolved for large sensors. Conversely, the plasma etching produced large-size and spotless filters with relatively high reproducibility. This large-area etching capability, down to a centimeter range, can then be efficiently used for a multiple lens-free fluorescent device fabrication.
Keyword (in Japanese) (See Japanese page) 
(in English) Lens-free imaging / Interference filter / Absorption filter / Laser lift-off / Plasma etching / / /  
Reference Info. ITE Tech. Rep., vol. 44, no. 14, IST2020-34, pp. 1-5, July 2020.
Paper # IST2020-34 
Date of Issue 2020-06-24 (IST) 
ISSN Print edition: ISSN 1342-6893    Online edition: ISSN 2424-1970
Download PDF

Conference Information
Committee IST  
Conference Date 2020-07-01 - 2020-07-01 
Place (in Japanese) (See Japanese page) 
Place (in English) Online 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To IST 
Conference Code 2020-07-IST 
Language English 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication of Large-Size and High-Uniformity Thin Composite Emission Filter for Lens-Free Fluorescent Imager 
Sub Title (in English)  
Keyword(1) Lens-free imaging  
Keyword(2) Interference filter  
Keyword(3) Absorption filter  
Keyword(4) Laser lift-off  
Keyword(5) Plasma etching  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Erus Rustami  
1st Author's Affiliation Nara Institute of Science and Technology (NAIST)
2nd Author's Name Kiyotaka Sasagawa  
2nd Author's Affiliation Nara Institute of Science and Technology (NAIST)
3rd Author's Name Thanet Pakpuwadon  
3rd Author's Affiliation Nara Institute of Science and Technology (NAIST)
4th Author's Name Yasumi Ohta  
4th Author's Affiliation Nara Institute of Science and Technology (NAIST)
5th Author's Name Hironari Takehara  
5th Author's Affiliation Nara Institute of Science and Technology (NAIST)
6th Author's Name Makito Haruta  
6th Author's Affiliation Nara Institute of Science and Technology (NAIST)
7th Author's Name Jun Ohta  
7th Author's Affiliation Nara Institute of Science and Technology (NAIST)
8th Author's Name  
8th Author's Affiliation ()
9th Author's Name  
9th Author's Affiliation ()
10th Author's Name  
10th Author's Affiliation ()
11th Author's Name  
11th Author's Affiliation ()
12th Author's Name  
12th Author's Affiliation ()
13th Author's Name  
13th Author's Affiliation ()
14th Author's Name  
14th Author's Affiliation ()
15th Author's Name  
15th Author's Affiliation ()
16th Author's Name  
16th Author's Affiliation ()
17th Author's Name  
17th Author's Affiliation ()
18th Author's Name  
18th Author's Affiliation ()
19th Author's Name  
19th Author's Affiliation ()
20th Author's Name  
20th Author's Affiliation ()
21st Author's Name  
21st Author's Affiliation ()
22nd Author's Name  
22nd Author's Affiliation ()
23rd Author's Name  
23rd Author's Affiliation ()
24th Author's Name  
24th Author's Affiliation ()
25th Author's Name  
25th Author's Affiliation ()
26th Author's Name / /
26th Author's Affiliation ()
()
27th Author's Name / /
27th Author's Affiliation ()
()
28th Author's Name / /
28th Author's Affiliation ()
()
29th Author's Name / /
29th Author's Affiliation ()
()
30th Author's Name / /
30th Author's Affiliation ()
()
31st Author's Name / /
31st Author's Affiliation ()
()
32nd Author's Name / /
32nd Author's Affiliation ()
()
33rd Author's Name / /
33rd Author's Affiliation ()
()
34th Author's Name / /
34th Author's Affiliation ()
()
35th Author's Name / /
35th Author's Affiliation ()
()
36th Author's Name / /
36th Author's Affiliation ()
()
Speaker Author-1 
Date Time 2020-07-01 13:30:00 
Presentation Time 30 minutes 
Registration for IST 
Paper # IST2020-34 
Volume (vol) vol.44 
Number (no) no.14 
Page pp.1-5 
#Pages
Date of Issue 2020-06-24 (IST) 


[Return to Top Page]

[Return to ITE Web Page]


The Institute of Image Information and Television Engineers (ITE), Japan