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Paper Abstract and Keywords
Presentation 2021-10-21 10:50
High-precision CMOS Proximity Capacitance Image Sensors with Large-format 12 µm and High-resolution 2.8 µm Pixels
Yuki Sugama, Yoshiaki Watanabe, Rihito Kuroda, Masahiro Yamamoto, Tetsuya Goto (Tohoku Univ.), Toshiro Yasuda, Shinichi Murakami, Hiroshi Hamori (OHT), Naoya Kuriyama (LAPIS Semiconductor), Shigetoshi Sugawa (Tohoku Univ.)
Abstract (in Japanese) (See Japanese page) 
(in English) This paper presents newly developed two high-precision CMOS proximity capacitance image sensors: Chip A with 12 µm pitch pixels with a large detection area of 1.68 $cm^2$; Chip B with 2.8 µm pitch 1.8 M pixels for a higher resolution. Both fabricated chips achieved a capacitance detection precision of less than 100 zF ($10^{-19}$ F) at an input voltage of 20 V and less than 10 zF ($10^{-20}$ F) at 300 V due to the noise cancelling technique. Furthermore, by using multiple input pulse amplitudes, a capacitance detection dynamic range of 120 dB was achieved. The examples of capacitance imaging using the fabricated chips are also demonstrated.
Keyword (in Japanese) (See Japanese page) 
(in English) CMOS / Proximity Capacitance / Image Sensor / High Precision / Large Format / High Resolution / /  
Reference Info. ITE Tech. Rep., vol. 45, no. 30, IST2021-51, pp. 13-16, Oct. 2021.
Paper # IST2021-51 
Date of Issue 2021-10-14 (IST) 
ISSN Print edition: ISSN 1342-6893    Online edition: ISSN 2424-1970
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Conference Information
Committee IST  
Conference Date 2021-10-21 - 2021-10-21 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English) Image Sensor , etc. 
Paper Information
Registration To IST 
Conference Code 2021-10-IST 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) High-precision CMOS Proximity Capacitance Image Sensors with Large-format 12 µm and High-resolution 2.8 µm Pixels 
Sub Title (in English)  
Keyword(1) CMOS  
Keyword(2) Proximity Capacitance  
Keyword(3) Image Sensor  
Keyword(4) High Precision  
Keyword(5) Large Format  
Keyword(6) High Resolution  
1st Author's Name Yuki Sugama  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
2nd Author's Name Yoshiaki Watanabe  
2nd Author's Affiliation Tohoku University (Tohoku Univ.)
3rd Author's Name Rihito Kuroda  
3rd Author's Affiliation Tohoku University (Tohoku Univ.)
4th Author's Name Masahiro Yamamoto  
4th Author's Affiliation Tohoku University (Tohoku Univ.)
5th Author's Name Tetsuya Goto  
5th Author's Affiliation Tohoku University (Tohoku Univ.)
6th Author's Name Toshiro Yasuda  
6th Author's Affiliation OHT inc. (OHT)
7th Author's Name Shinichi Murakami  
7th Author's Affiliation OHT inc. (OHT)
8th Author's Name Hiroshi Hamori  
8th Author's Affiliation OHT inc. (OHT)
9th Author's Name Naoya Kuriyama  
9th Author's Affiliation LAPIS Semiconductor Co. Ltd. (LAPIS Semiconductor)
10th Author's Name Shigetoshi Sugawa  
10th Author's Affiliation Tohoku University (Tohoku Univ.)
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Speaker Author-1 
Date Time 2021-10-21 10:50:00 
Presentation Time 20 minutes 
Registration for IST 
Paper # IST2021-51 
Volume (vol) vol.45 
Number (no) no.30 
Page pp.13-16 
Date of Issue 2021-10-14 (IST) 

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