| Paper Abstract and Keywords |
| Presentation |
2021-10-21 10:50
High-precision CMOS Proximity Capacitance Image Sensors with Large-format 12 µm and High-resolution 2.8 µm Pixels
Yuki Sugama, Yoshiaki Watanabe, Rihito Kuroda, Masahiro Yamamoto, Tetsuya Goto (Tohoku Univ.), Toshiro Yasuda, Shinichi Murakami, Hiroshi Hamori (OHT), Naoya Kuriyama (LAPIS Semiconductor), Shigetoshi Sugawa (Tohoku Univ.) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
This paper presents newly developed two high-precision CMOS proximity capacitance image sensors: Chip A with 12 µm pitch pixels with a large detection area of 1.68 $cm^2$; Chip B with 2.8 µm pitch 1.8 M pixels for a higher resolution. Both fabricated chips achieved a capacitance detection precision of less than 100 zF ($10^{-19}$ F) at an input voltage of 20 V and less than 10 zF ($10^{-20}$ F) at 300 V due to the noise cancelling technique. Furthermore, by using multiple input pulse amplitudes, a capacitance detection dynamic range of 120 dB was achieved. The examples of capacitance imaging using the fabricated chips are also demonstrated. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
CMOS / Proximity Capacitance / Image Sensor / High Precision / Large Format / High Resolution / / |
| Reference Info. |
ITE Tech. Rep., vol. 45, no. 30, IST2021-51, pp. 13-16, Oct. 2021. |
| Paper # |
IST2021-51 |
| Date of Issue |
2021-10-14 (IST) |
| ISSN |
Print edition: ISSN 1342-6893 Online edition: ISSN 2424-1970 |
| Download PDF |
|
| Conference Information |
| Committee |
IST |
| Conference Date |
2021-10-21 - 2021-10-21 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
|
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Image Sensor , etc. |
| Paper Information |
| Registration To |
IST |
| Conference Code |
2021-10-IST |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
High-precision CMOS Proximity Capacitance Image Sensors with Large-format 12 µm and High-resolution 2.8 µm Pixels |
| Sub Title (in English) |
|
| Keyword(1) |
CMOS |
| Keyword(2) |
Proximity Capacitance |
| Keyword(3) |
Image Sensor |
| Keyword(4) |
High Precision |
| Keyword(5) |
Large Format |
| Keyword(6) |
High Resolution |
| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Yuki Sugama |
| 1st Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 2nd Author's Name |
Yoshiaki Watanabe |
| 2nd Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 3rd Author's Name |
Rihito Kuroda |
| 3rd Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 4th Author's Name |
Masahiro Yamamoto |
| 4th Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 5th Author's Name |
Tetsuya Goto |
| 5th Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 6th Author's Name |
Toshiro Yasuda |
| 6th Author's Affiliation |
OHT inc. (OHT) |
| 7th Author's Name |
Shinichi Murakami |
| 7th Author's Affiliation |
OHT inc. (OHT) |
| 8th Author's Name |
Hiroshi Hamori |
| 8th Author's Affiliation |
OHT inc. (OHT) |
| 9th Author's Name |
Naoya Kuriyama |
| 9th Author's Affiliation |
LAPIS Semiconductor Co. Ltd. (LAPIS Semiconductor) |
| 10th Author's Name |
Shigetoshi Sugawa |
| 10th Author's Affiliation |
Tohoku University (Tohoku Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2021-10-21 10:50:00 |
| Presentation Time |
20 minutes |
| Registration for |
IST |
| Paper # |
IST2021-51 |
| Volume (vol) |
vol.45 |
| Number (no) |
no.30 |
| Page |
pp.13-16 |
| #Pages |
4 |
| Date of Issue |
2021-10-14 (IST) |