| Paper Abstract and Keywords |
| Presentation |
2021-10-21 13:40
A 3-Tap Global Shutter 5.0um Pixel with Background Canceling for 165MHz Modulated Pulsed Indirect Time-of-Flight Image Sensor
Masafumi Tsutsui, Toshifumi Yokoyama, Takahisa Ogawa, Ikuo Mizuno, Nobuyoshi Takahashi (TPSCo), Cheng Ma (Gpixel INC), Fei Wang (Orbbec Shenzhen), Joris Debondt, Jan Bogaerts (Gpixel NV), Xinyang Wang (Gpixel INC), Assaf Lahav (Tower Semiconductor) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
3-tap global shutter 5.0um pixel with background canceling for pulsed indirect time-of-flight image sensor has been developed. 2.5um-pitch hybrid bonding is used for stacking sensor and logic wafers. Parasitic light sensitivity of taps is suppressed by 4um-depth backside deep trench isolation, and 6um-thick-epi is used to enhance QE at 940nm wavelength. To enhance pixel response for high modulation frequency of pulsed light, transfer path to each taps is designed to have asymmetric path to minimize transfer length, and electric field in photodiode is carefully designed along vertical and lateral transfer directions. Demodulation contrast of 81% at 165MHz without background canceling is achieved. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
depth sensing / indirect time-of-flight / multi-tap / CMOS image sensor / / / / |
| Reference Info. |
ITE Tech. Rep., vol. 45, no. 30, IST2021-56, pp. 33-36, Oct. 2021. |
| Paper # |
IST2021-56 |
| Date of Issue |
2021-10-14 (IST) |
| ISSN |
Print edition: ISSN 1342-6893 Online edition: ISSN 2424-1970 |
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