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Paper Abstract and Keywords
Presentation 2021-10-21 13:40
A 3-Tap Global Shutter 5.0um Pixel with Background Canceling for 165MHz Modulated Pulsed Indirect Time-of-Flight Image Sensor
Masafumi Tsutsui, Toshifumi Yokoyama, Takahisa Ogawa, Ikuo Mizuno, Nobuyoshi Takahashi (TPSCo), Cheng Ma (Gpixel INC), Fei Wang (Orbbec Shenzhen), Joris Debondt, Jan Bogaerts (Gpixel NV), Xinyang Wang (Gpixel INC), Assaf Lahav (Tower Semiconductor)
Abstract (in Japanese) (See Japanese page) 
(in English) 3-tap global shutter 5.0um pixel with background canceling for pulsed indirect time-of-flight image sensor has been developed. 2.5um-pitch hybrid bonding is used for stacking sensor and logic wafers. Parasitic light sensitivity of taps is suppressed by 4um-depth backside deep trench isolation, and 6um-thick-epi is used to enhance QE at 940nm wavelength. To enhance pixel response for high modulation frequency of pulsed light, transfer path to each taps is designed to have asymmetric path to minimize transfer length, and electric field in photodiode is carefully designed along vertical and lateral transfer directions. Demodulation contrast of 81% at 165MHz without background canceling is achieved.
Keyword (in Japanese) (See Japanese page) 
(in English) depth sensing / indirect time-of-flight / multi-tap / CMOS image sensor / / / /  
Reference Info. ITE Tech. Rep., vol. 45, no. 30, IST2021-56, pp. 33-36, Oct. 2021.
Paper # IST2021-56 
Date of Issue 2021-10-14 (IST) 
ISSN Print edition: ISSN 1342-6893  Online edition: ISSN 2424-1970
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Conference Information
Committee IST  
Conference Date 2021-10-21 - 2021-10-21 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English) Image Sensor , etc. 
Paper Information
Registration To IST 
Conference Code 2021-10-IST 
Language English (Japanese title is available) 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) A 3-Tap Global Shutter 5.0um Pixel with Background Canceling for 165MHz Modulated Pulsed Indirect Time-of-Flight Image Sensor 
Sub Title (in English)  
Keyword(1) depth sensing  
Keyword(2) indirect time-of-flight  
Keyword(3) multi-tap  
Keyword(4) CMOS image sensor  
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1st Author's Name Masafumi Tsutsui  
1st Author's Affiliation Tower Partners Semiconductor Co. Ltd. (TPSCo)
2nd Author's Name Toshifumi Yokoyama  
2nd Author's Affiliation Tower Partners Semiconductor Co. Ltd. (TPSCo)
3rd Author's Name Takahisa Ogawa  
3rd Author's Affiliation Tower Partners Semiconductor Co. Ltd. (TPSCo)
4th Author's Name Ikuo Mizuno  
4th Author's Affiliation Tower Partners Semiconductor Co. Ltd. (TPSCo)
5th Author's Name Nobuyoshi Takahashi  
5th Author's Affiliation Tower Partners Semiconductor Co. Ltd. (TPSCo)
6th Author's Name Cheng Ma  
6th Author's Affiliation Gpixel INC (Gpixel INC)
7th Author's Name Fei Wang  
7th Author's Affiliation Orbbec Shenzhen (Orbbec Shenzhen)
8th Author's Name Joris Debondt  
8th Author's Affiliation Gpixel NV (Gpixel NV)
9th Author's Name Jan Bogaerts  
9th Author's Affiliation Gpixel NV (Gpixel NV)
10th Author's Name Xinyang Wang  
10th Author's Affiliation Gpixel INC (Gpixel INC)
11th Author's Name Assaf Lahav  
11th Author's Affiliation Tower Semiconductor (Tower Semiconductor)
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Speaker
Date Time 2021-10-21 13:40:00 
Presentation Time 20 
Registration for IST 
Paper # ITE-IST2021-56 
Volume (vol) ITE-45 
Number (no) no.30 
Page pp.33-36 
#Pages ITE-4 
Date of Issue ITE-IST-2021-10-14 


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