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Paper Abstract and Keywords
Presentation 2022-03-28 09:55
3D Sequential Process Integraton for CMOS Image Sensor
Keiichi Nakazawa, Junpei Yamamoto, Shigetaka Mori, Shintarou Okamoto, Akito Shimizu, Koichi Baba, Nobutoshi Fujii, Mutsuo Uehara, Katsunori Hiramatsu, Hideomi Kumano, Akira Matsumoto, Kouichirou Zaitsu, Hidetoshi Ohnuma, Keiji Tatani, Tomoyuki Hirano, Hayato Iwamoto (Sony Semconductor Solutions Corp.)
Abstract (in Japanese) (See Japanese page) 
(in English) We developed a new structure of pixel transistors stacked over photodiode named “2-Layer Transistor Pixel Stacked CMOS Image Sensor” (2-Layer Pixel). It was fabricated by 3D sequential process integration with new process techniques, such as thermally stable wafer bonding and deep contacts. With this technology, we successfully increased AMP size and demonstrated backside-illuminated CMOS image sensor of 6752 x 4928 pixels at 0.7um pitch to prove its functionality and integrity.
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Reference Info. ITE Tech. Rep., vol. 46, no. 14, IST2022-12, pp. 9-12, March 2022.
Paper # IST2022-12 
Date of Issue 2022-03-21 (IST) 
ISSN Print edition: ISSN 1342-6893    Online edition: ISSN 2424-1970
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Conference Information
Committee IST  
Conference Date 2022-03-28 - 2022-03-28 
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Paper Information
Registration To IST 
Conference Code 2022-03-IST 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) 3D Sequential Process Integraton for CMOS Image Sensor 
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1st Author's Name Keiichi Nakazawa  
1st Author's Affiliation Sony Semiconductor Solutions Corporation (Sony Semconductor Solutions Corp.)
2nd Author's Name Junpei Yamamoto  
2nd Author's Affiliation Sony Semiconductor Solutions Corporation (Sony Semconductor Solutions Corp.)
3rd Author's Name Shigetaka Mori  
3rd Author's Affiliation Sony Semiconductor Solutions Corporation (Sony Semconductor Solutions Corp.)
4th Author's Name Shintarou Okamoto  
4th Author's Affiliation Sony Semiconductor Solutions Corporation (Sony Semconductor Solutions Corp.)
5th Author's Name Akito Shimizu  
5th Author's Affiliation Sony Semiconductor Solutions Corporation (Sony Semconductor Solutions Corp.)
6th Author's Name Koichi Baba  
6th Author's Affiliation Sony Semiconductor Solutions Corporation (Sony Semconductor Solutions Corp.)
7th Author's Name Nobutoshi Fujii  
7th Author's Affiliation Sony Semiconductor Solutions Corporation (Sony Semconductor Solutions Corp.)
8th Author's Name Mutsuo Uehara  
8th Author's Affiliation Sony Semiconductor Solutions Corporation (Sony Semconductor Solutions Corp.)
9th Author's Name Katsunori Hiramatsu  
9th Author's Affiliation Sony Semiconductor Solutions Corporation (Sony Semconductor Solutions Corp.)
10th Author's Name Hideomi Kumano  
10th Author's Affiliation Sony Semiconductor Solutions Corporation (Sony Semconductor Solutions Corp.)
11th Author's Name Akira Matsumoto  
11th Author's Affiliation Sony Semiconductor Solutions Corporation (Sony Semconductor Solutions Corp.)
12th Author's Name Kouichirou Zaitsu  
12th Author's Affiliation Sony Semiconductor Solutions Corporation (Sony Semconductor Solutions Corp.)
13th Author's Name Hidetoshi Ohnuma  
13th Author's Affiliation Sony Semiconductor Solutions Corporation (Sony Semconductor Solutions Corp.)
14th Author's Name Keiji Tatani  
14th Author's Affiliation Sony Semiconductor Solutions Corporation (Sony Semconductor Solutions Corp.)
15th Author's Name Tomoyuki Hirano  
15th Author's Affiliation Sony Semiconductor Solutions Corporation (Sony Semconductor Solutions Corp.)
16th Author's Name Hayato Iwamoto  
16th Author's Affiliation Sony Semiconductor Solutions Corporation (Sony Semconductor Solutions Corp.)
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Date Time 2022-03-28 09:55:00 
Presentation Time 30 minutes 
Registration for IST 
Paper # IST2022-12 
Volume (vol) vol.46 
Number (no) no.14 
Page pp.9-12 
#Pages 4 
Date of Issue 2022-03-21 (IST) 

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