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Paper Abstract and Keywords
Presentation 2023-06-08 15:25
Fabrication of oxide/nitride matrix thin films by pulsed DC reactive sputtering method for realization of Co-based superparamagnetic granular thin films with high magnetization
Takumi Kobayashi, Ryutaro Ono, Genta Egawa, Satoru Yoshimura (Akita Univ.)
Abstract (in Japanese) (See Japanese page) 
(in English) In order to realize a Co-based superparamagnetic granular thin film with high magnetization, which can create new magnetic devices such as new functional magnetic sensors capable of detecting zero magnetic fields and omnidirectional magnetic fields, it is necessary to increase the concentration of Co grain with the size of less than 6.9 nm diameter in this thin film. To suppress the grain growth in thin films, in generally, higher deposition rate is effective, and authors already showed that the high speed deposition is effective to suppress the grain growth of Co to the size of less than 6.9 nm diameter in the superparamagnetic granular thin film. In this study, in order to realize the high speed deposition rate of the oxide thin film, which is matrix of Co grains and whose film deposition rate is generally extremely slow, we investigated the film fabrication process using a pulsed DC reactive sputtering method. It was found that an oxide with a stoichiometric composition can be formed at a high deposition rate even at a low oxygen partial pressure of sputtering gas.
Keyword (in Japanese) (See Japanese page) 
(in English) Superparamagnetic thin films / Saturation magnetization / Pulsed DC reactive sputtering / High deposition rate / Magnetic sensor / / /  
Reference Info. ITE Tech. Rep., vol. 47, no. 17, MMS2023-35, pp. 1-8, June 2023.
Paper # MMS2023-35 
Date of Issue 2023-06-01 (MMS) 
ISSN Online edition: ISSN 2424-1970
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Conference Information
Committee IEICE-MRIS MMS  
Conference Date 2023-06-08 - 2023-06-09 
Place (in Japanese) (See Japanese page) 
Place (in English) RIEC, Tohoku Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Recording system, Head, Media, and Others 
Paper Information
Registration To MMS 
Conference Code 2023-06-MRIS-MMS 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication of oxide/nitride matrix thin films by pulsed DC reactive sputtering method for realization of Co-based superparamagnetic granular thin films with high magnetization 
Sub Title (in English)  
Keyword(1) Superparamagnetic thin films  
Keyword(2) Saturation magnetization  
Keyword(3) Pulsed DC reactive sputtering  
Keyword(4) High deposition rate  
Keyword(5) Magnetic sensor  
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1st Author's Name Takumi Kobayashi  
1st Author's Affiliation Akita University (Akita Univ.)
2nd Author's Name Ryutaro Ono  
2nd Author's Affiliation Akita University (Akita Univ.)
3rd Author's Name Genta Egawa  
3rd Author's Affiliation Akita University (Akita Univ.)
4th Author's Name Satoru Yoshimura  
4th Author's Affiliation Akita University (Akita Univ.)
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Speaker Author-4 
Date Time 2023-06-08 15:25:00 
Presentation Time 25 minutes 
Registration for MMS 
Paper # MMS2023-35 
Volume (vol) vol.47 
Number (no) no.17 
Page pp.1-8 
#Pages
Date of Issue 2023-06-01 (MMS) 


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