| Paper Abstract and Keywords |
| Presentation |
2025-01-23 13:20
[Poster Presentation]
Mechanism of carbon incorporation to layered BN films grown by low-pressure CVD using BCl3 as a boron source
Ruki Aoike, Soma Ota, Akira Takemura, Hayato Nakano, Ryota Aoyama, Takumi Naruse, Hiroko Kominami, Kazuhiro Hara (Shizuoka Univ.) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
We have been working on low-pressure chemical vapor deposition of hexagonal boron nitride thin films using BCl3 gas as a boron source. It was expected that C impurities in the films can be reduced because BCl3 does not contain C. However, it has been found that a considerable amount of C was contained in the films. In this study, the C concentration in the grown film and its influence on film properties were investigated. The films grown in the H2 atmosphere showed lower C concentrations than those grown in the N2 atmosphere and larger change in the size and shape of the grains. Furthermore, it was suggested that C incorporation is also affected by the film formation process. The C impurity-rerated emissions were discussed based on the dependence of the emission spectra on C concentration. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
Boron nitride / CVD / Layered material / Deep-ultraviolet emission / Cathodoluminescence / Carbon impurity / / |
| Reference Info. |
ITE Tech. Rep., vol. 49, no. 1, IDY2025-3, pp. 9-12, Jan. 2025. |
| Paper # |
IDY2025-3 |
| Date of Issue |
2025-01-16 (IDY) |
| ISSN |
Online edition: ISSN 2424-1970 |
| Download PDF |
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| Conference Information |
| Committee |
IEICE-EID IDY SID-JC IEIJ-SSL IEE-EDD |
| Conference Date |
2025-01-23 - 2025-01-24 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
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| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
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| Paper Information |
| Registration To |
IDY |
| Conference Code |
2025-01-EID-IDY-JC-SSL-EDD |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Mechanism of carbon incorporation to layered BN films grown by low-pressure CVD using BCl3 as a boron source |
| Sub Title (in English) |
|
| Keyword(1) |
Boron nitride |
| Keyword(2) |
CVD |
| Keyword(3) |
Layered material |
| Keyword(4) |
Deep-ultraviolet emission |
| Keyword(5) |
Cathodoluminescence |
| Keyword(6) |
Carbon impurity |
| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Ruki Aoike |
| 1st Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 2nd Author's Name |
Soma Ota |
| 2nd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 3rd Author's Name |
Akira Takemura |
| 3rd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 4th Author's Name |
Hayato Nakano |
| 4th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 5th Author's Name |
Ryota Aoyama |
| 5th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 6th Author's Name |
Takumi Naruse |
| 6th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 7th Author's Name |
Hiroko Kominami |
| 7th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 8th Author's Name |
Kazuhiro Hara |
| 8th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2025-01-23 13:20:00 |
| Presentation Time |
5 minutes |
| Registration for |
IDY |
| Paper # |
IDY2025-3 |
| Volume (vol) |
vol.49 |
| Number (no) |
no.1 |
| Page |
pp.9-12 |
| #Pages |
4 |
| Date of Issue |
2025-01-16 (IDY) |