| Paper Abstract and Keywords |
| Presentation |
2025-01-23 13:10
[Poster Presentation]
Mist CVD and characterization of ZnO-nanoparticle-dispersed Ga2O3 films
Takeshi Ohkutsu, Hina Saito, Hiroto Ujiie, Rio Tanigawa, Kazuhiko Hara, Tetsuya Kono, Hioko Kominami (Shizuoka Univ.) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
ZnO nanoparticle-dispersed Ga2O3 thin films were prepared on c-plane sapphire substrates by the mist chemical vapor deposition. First, the change in the crystal structure of Ga2O3 with substrate temperature (Tg) was investigated, and 500 ℃ was determined as the Tg at which the αphase is stably formed. Then, ZnO nanoparticles were dispersed in the α-Ga2O3 film by adding ZnO nanoparticles to the source solution. The grown samples showed photoluminescence that can be assigned to emission from ZnO at room temperature. Elemental analysis by transmission electron microscopy showed a granular region with high Zn concentrations that is considered ZnO nanoparticle. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
Mist chemical vapor deposition / ZnO / Ga2O3 / Thin films growth / Photoluminescence / / / |
| Reference Info. |
ITE Tech. Rep., vol. 49, no. 1, IDY2025-2, pp. 5-8, Jan. 2025. |
| Paper # |
IDY2025-2 |
| Date of Issue |
2025-01-16 (IDY) |
| ISSN |
Online edition: ISSN 2424-1970 |
| Download PDF |
|
| Conference Information |
| Committee |
IEICE-EID IDY SID-JC IEIJ-SSL IEE-EDD |
| Conference Date |
2025-01-23 - 2025-01-24 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
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| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
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| Paper Information |
| Registration To |
IDY |
| Conference Code |
2025-01-EID-IDY-JC-SSL-EDD |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Mist CVD and characterization of ZnO-nanoparticle-dispersed Ga2O3 films |
| Sub Title (in English) |
|
| Keyword(1) |
Mist chemical vapor deposition |
| Keyword(2) |
ZnO |
| Keyword(3) |
Ga2O3 |
| Keyword(4) |
Thin films growth |
| Keyword(5) |
Photoluminescence |
| Keyword(6) |
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| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Takeshi Ohkutsu |
| 1st Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 2nd Author's Name |
Hina Saito |
| 2nd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 3rd Author's Name |
Hiroto Ujiie |
| 3rd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 4th Author's Name |
Rio Tanigawa |
| 4th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 5th Author's Name |
Kazuhiko Hara |
| 5th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 6th Author's Name |
Tetsuya Kono |
| 6th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 7th Author's Name |
Hioko Kominami |
| 7th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2025-01-23 13:10:00 |
| Presentation Time |
5 minutes |
| Registration for |
IDY |
| Paper # |
IDY2025-2 |
| Volume (vol) |
vol.49 |
| Number (no) |
no.1 |
| Page |
pp.5-8 |
| #Pages |
4 |
| Date of Issue |
2025-01-16 (IDY) |