| Paper Abstract and Keywords |
| Presentation |
2026-01-29 13:45
[Poster Presentation]
Formation of polytypes in layered BN thin films grown by low-pressure chemical vapor deposition
Hayato Nakano, Akira Takemura, Ryota Aoyama, Kosuke Hiraoka, Kazuhiko Hara, Hiroko Kominami (Shizuoka Univ.) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
The effects of growth conditions on the formation of polytypes were investigated in the thin film growth of boron nitrides (BN) with layered crystal structures on c-plane sapphire substrates using low-pressure chemical vapor deposition (CVD) with BCl₃ and NH₃ as source materials. The conditions varied in this study were the growth atmosphere and the source gas flow rate. Samples were characterized focusing on hexagonal boron nitride (h-BN) and rhombohedral boron nitride (r-BN). Regarding the growth atmosphere, growth was performed in N₂, H₂, or Ar. While r-BN formation was dominant in all samples, h-BN formation was promoted in H₂. Regarding the source gas flow rate, h-BN formation was dominant under conditions with a high NH₃ flow rate. Based on these results, factors favoring the formation of specific polymorphs were discussed. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
hexagonal boron nitride / rhombohedral boron nitride / chemical vapor deposition / X-ray diffraction / cathodoluminescence / / / |
| Reference Info. |
ITE Tech. Rep., vol. 50, no. 2, IDY2026-1, pp. 1-4, Jan. 2026. |
| Paper # |
IDY2026-1 |
| Date of Issue |
2026-01-22 (IDY) |
| ISSN |
Online edition: ISSN 2424-1970 |
| Download PDF |
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| Conference Information |
| Committee |
IEICE-EID IDY IEE-EDD SID-JC IEIJ-SSL |
| Conference Date |
2026-01-29 - 2026-01-30 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
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| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
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| Paper Information |
| Registration To |
IDY |
| Conference Code |
2026-01-EID-IDY-EDD-JC-SSL |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Formation of polytypes in layered BN thin films grown by low-pressure chemical vapor deposition |
| Sub Title (in English) |
|
| Keyword(1) |
hexagonal boron nitride |
| Keyword(2) |
rhombohedral boron nitride |
| Keyword(3) |
chemical vapor deposition |
| Keyword(4) |
X-ray diffraction |
| Keyword(5) |
cathodoluminescence |
| Keyword(6) |
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| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Hayato Nakano |
| 1st Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 2nd Author's Name |
Akira Takemura |
| 2nd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 3rd Author's Name |
Ryota Aoyama |
| 3rd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 4th Author's Name |
Kosuke Hiraoka |
| 4th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 5th Author's Name |
Kazuhiko Hara |
| 5th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 6th Author's Name |
Hiroko Kominami |
| 6th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2026-01-29 13:45:00 |
| Presentation Time |
5 minutes |
| Registration for |
IDY |
| Paper # |
IDY2026-1 |
| Volume (vol) |
vol.50 |
| Number (no) |
no.2 |
| Page |
pp.1-4 |
| #Pages |
4 |
| Date of Issue |
2026-01-22 (IDY) |