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Paper Abstract and Keywords
Presentation 2026-03-13 15:00
[Invited Talk] Advanced High-Mobility Multilayer TFTs Using Dynamic PVD Gas Separation System
Yujiro Takeda, Wei-Chun Ma, You-Ron Lin, Elliot Lu (Applied Materials Taiwan), Dejiu Fan, Jung Bae Kim (Applied Materials), Lynn Yang, Juergen Grillmayer (Applied Materials Taiwan), Zero Hung (Applied Materials), Marcus Bender (Applied Materials GmbH & Co. KG), Soo Young Choi (Applied Materials)
Abstract (in Japanese) (See Japanese page) 
(in English) We investigated high-mobility multilayer TFTs using the dynamic PVD system. The gas separation unit allows comparable TFT performance without a significant increase footprint. The resulting TFTs demonstrate a high field-effect mobility of 26.2 cm²/V·s. In addition, process optimizations enabled the reduction of the channel length to 2 μm, and improved PBTS reliability, with ΔVth 0.8 V.
Keyword (in Japanese) (See Japanese page) 
(in English) high mobility / multilayer / TFT / dynamic PVD / Gas separation / / /  
Reference Info. ITE Tech. Rep., vol. 50, no. 10, IDY2026-31, pp. 24-28, March 2026.
Paper # IDY2026-31 
Date of Issue 2026-03-06 (IDY) 
ISSN Online edition: ISSN 2424-1970
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Conference Information
Committee IDY SID-JC  
Conference Date 2026-03-13 - 2026-03-13 
Place (in Japanese) (See Japanese page) 
Place (in English) online 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To IDY 
Conference Code 2026-03-IDY-JC 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Advanced High-Mobility Multilayer TFTs Using Dynamic PVD Gas Separation System 
Sub Title (in English)  
Keyword(1) high mobility  
Keyword(2) multilayer  
Keyword(3) TFT  
Keyword(4) dynamic PVD  
Keyword(5) Gas separation  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Yujiro Takeda  
1st Author's Affiliation Applied Materials Taiwan (Applied Materials Taiwan)
2nd Author's Name Wei-Chun Ma  
2nd Author's Affiliation Applied Materials Taiwan (Applied Materials Taiwan)
3rd Author's Name You-Ron Lin  
3rd Author's Affiliation Applied Materials Taiwan (Applied Materials Taiwan)
4th Author's Name Elliot Lu  
4th Author's Affiliation Applied Materials Taiwan (Applied Materials Taiwan)
5th Author's Name Dejiu Fan  
5th Author's Affiliation Applied Materials, Inc. (Applied Materials)
6th Author's Name Jung Bae Kim  
6th Author's Affiliation Applied Materials, Inc. (Applied Materials)
7th Author's Name Lynn Yang  
7th Author's Affiliation Applied Materials Taiwan (Applied Materials Taiwan)
8th Author's Name Juergen Grillmayer  
8th Author's Affiliation Applied Materials Taiwan (Applied Materials Taiwan)
9th Author's Name Zero Hung  
9th Author's Affiliation Applied Materials, Inc. (Applied Materials)
10th Author's Name Marcus Bender  
10th Author's Affiliation Applied Materials GmbH & Co. KG (Applied Materials GmbH & Co. KG)
11th Author's Name Soo Young Choi  
11th Author's Affiliation Applied Materials, Inc. (Applied Materials)
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Speaker Author-1 
Date Time 2026-03-13 15:00:00 
Presentation Time 20 minutes 
Registration for IDY 
Paper # IDY2026-31 
Volume (vol) vol.50 
Number (no) no.10 
Page pp.24-28 
#Pages 5 
Date of Issue 2026-03-06 (IDY) 

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