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Paper Abstract and Keywords
Presentation
2026-08-04 10:00
[Invited Talk] Further Scaling of the Capacitance Equivalent Thickness (CET) In High-k/Metal Gate Stacks Toward the 2nm Technology Node and Beyond: Prospects and Challenges
Yukinori Morita
,
Takamasa Kawanago
,
Takefumi Kamioka
(
AIST/LSTC
),
Yuichiro Mitani
(
Tokyo City Univ./LSTC
),
Toshihide Nabatame
,
Takashi Onaya
,
Naoki Fukata
,
Wipakorn Jevasuwan
,
Kazuhito Tsukagoshi
(
NIMS/LSTC
),
Takuya Hoshii
(
Science Tokyo/LSTC
),
Kasidit Toprasertpong
,
Atsushi Tamura
,
Koji Kita
(
The Univ. Tokyo/LSTC
),
Naoya Okada
,
Kenzo Manabe
,
Wataru Mizubayashi
,
Hiroyuki Ota
,
Takashi Matsukawa
,
Shinji Migita
(
AIST/LSTC
)
Abstract
(in Japanese)
(See Japanese page)
(in English)
(Not available yet)
Keyword
(in Japanese)
(See Japanese page)
(in English)
/ / / / / / /
Reference Info.
ITE Tech. Rep.
Paper #
Date of Issue
ISSN
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Conference Information
Committee
IEICE-ICD IEICE-SDM IST
Conference Date
2026-08-04 - 2026-08-06
Place (in Japanese)
(See Japanese page)
Place (in English)
Hokkaido Univ, Pharmaceutical Sciences, Lecture Room 2
Topics (in Japanese)
(See Japanese page)
Topics (in English)
Analog, Mixed Analog and Digital, RF, and Sensor Interface, Low Voltage/Low Power Techniques, Novel Devices/Circuits, and the Applications
Paper Information
Registration To
IEICE-SDM
Conference Code
2026-08-ICD-SDM-IST
Language
Japanese
Title (in Japanese)
(See Japanese page)
Sub Title (in Japanese)
(See Japanese page)
Title (in English)
Further Scaling of the Capacitance Equivalent Thickness (CET) In High-k/Metal Gate Stacks Toward the 2nm Technology Node and Beyond: Prospects and Challenges
Sub Title (in English)
Keyword(1)
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1st Author's Name
Yukinori Morita
1st Author's Affiliation
National Institute of Advanced Industrial Science and Technology/LSTC
(
AIST/LSTC
)
2nd Author's Name
Takamasa Kawanago
2nd Author's Affiliation
National Institute of Advanced Industrial Science and Technology/LSTC
(
AIST/LSTC
)
3rd Author's Name
Takefumi Kamioka
3rd Author's Affiliation
National Institute of Advanced Industrial Science and Technology/LSTC
(
AIST/LSTC
)
4th Author's Name
Yuichiro Mitani
4th Author's Affiliation
Tokyo City University/LSTC
(
Tokyo City Univ./LSTC
)
5th Author's Name
Toshihide Nabatame
5th Author's Affiliation
National Institute for Materials Science/LSTC
(
NIMS/LSTC
)
6th Author's Name
Takashi Onaya
6th Author's Affiliation
National Institute for Materials Science/LSTC
(
NIMS/LSTC
)
7th Author's Name
Naoki Fukata
7th Author's Affiliation
National Institute for Materials Science/LSTC
(
NIMS/LSTC
)
8th Author's Name
Wipakorn Jevasuwan
8th Author's Affiliation
National Institute for Materials Science/LSTC
(
NIMS/LSTC
)
9th Author's Name
Kazuhito Tsukagoshi
9th Author's Affiliation
National Institute for Materials Science/LSTC
(
NIMS/LSTC
)
10th Author's Name
Takuya Hoshii
10th Author's Affiliation
Science Tokyo/LSTC
(
Science Tokyo/LSTC
)
11th Author's Name
Kasidit Toprasertpong
11th Author's Affiliation
The University of Tokyo/LSTC
(
The Univ. Tokyo/LSTC
)
12th Author's Name
Atsushi Tamura
12th Author's Affiliation
The University of Tokyo/LSTC
(
The Univ. Tokyo/LSTC
)
13th Author's Name
Koji Kita
13th Author's Affiliation
The University of Tokyo/LSTC
(
The Univ. Tokyo/LSTC
)
14th Author's Name
Naoya Okada
14th Author's Affiliation
National Institute of Advanced Industrial Science and Technology/LSTC
(
AIST/LSTC
)
15th Author's Name
Kenzo Manabe
15th Author's Affiliation
National Institute of Advanced Industrial Science and Technology/LSTC
(
AIST/LSTC
)
16th Author's Name
Wataru Mizubayashi
16th Author's Affiliation
National Institute of Advanced Industrial Science and Technology/LSTC
(
AIST/LSTC
)
17th Author's Name
Hiroyuki Ota
17th Author's Affiliation
National Institute of Advanced Industrial Science and Technology/LSTC
(
AIST/LSTC
)
18th Author's Name
Takashi Matsukawa
18th Author's Affiliation
National Institute of Advanced Industrial Science and Technology/LSTC
(
AIST/LSTC
)
19th Author's Name
Shinji Migita
19th Author's Affiliation
National Institute of Advanced Industrial Science and Technology/LSTC
(
AIST/LSTC
)
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Speaker
Author-1
Date Time
2026-08-04 10:00:00
Presentation Time
45 minutes
Registration for
IEICE-SDM
Paper #
Volume (vol)
vol.
Number (no)
Page
#Pages
Date of Issue
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