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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
IST |
2021-03-26 09:25 |
Tokyo |
Online |
Evaluation of the effect of the 3D defect distribution created by plasma process on the dark current characteristics Yoshihiro Sato, Takayoshi Yamada, Kazuko Nishimura, Masayuki Yamasaki, Masashi Murakami (Panasonic), Keiichiro Urabe, Koji Eriguchi (Kyoto Univ.) |
Plasma processing is widely used in manufacturing present-day ULSI circuits. During plasma processing, defects are creat... [more] |
IST2021-9 pp.5-8 |
IEICE-MI, IEICE-IE, IEICE-SIP, IEICE-BioX, IST, ME [detail] |
2020-05-29 14:50 |
Online |
Online |
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[more] |
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IDY, IEICE-EID, IEE-EDD, IEIJ-OMD |
2011-01-28 14:40 |
Kochi |
Kochi University of Technology |
Growth of Magnesium Oxide (MgO) Thin Film with Mist Deposition.
-- Challenge to low temperature growth under the atmospheric pressure -- Toshiyuki Kawaharamura (Kochi Univ. Tech.), Hiroyuki Orita, Takahiro Shirahata (TMEIC), Takuto Igawa, Hiroshi Ito (Kyoto Univ.), Akio Yoshida (TMEIC), Shizuo Fujita (Kyoto Univ.), Takashi Hirao (Kochi Univ. Tech.) |
Magnesium oxide (MgO) thin film is useful as the protective film for plasma display and the antireflective film. Therefo... [more] |
IDY2011-3 pp.45-48 |
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