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| Search Results: Conference Papers |
| Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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| Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
| ME, JSPE-IAIP |
2022-09-02
13:10 |
Online |
Online |
*
Yuki Yamasaki, Koichi Ito, Takafumi Aoki (Tohoku Univ.), Junpei Uemoto (NICT) |
[more] |
ME2022-76
pp.15-18 |
| IST |
2021-03-26
09:25 |
Tokyo |
Online |
Evaluation of the effect of the 3D defect distribution created by plasma process on the dark current characteristics
Yoshihiro Sato, Takayoshi Yamada, Kazuko Nishimura, Masayuki Yamasaki, Masashi Murakami (Panasonic), Keiichiro Urabe, Koji Eriguchi (Kyoto Univ.) |
Plasma processing is widely used in manufacturing present-day ULSI circuits. During plasma processing, defects are creat... [more] |
IST2021-9
pp.5-8 |
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