| Paper Abstract and Keywords |
| Presentation |
2022-08-09 14:00
High-precision small capacitance difference measurement using proximity capacitance sensor
Yoshiaki Watanabe, Yuki Sugama, Yoshinobu Shiba, Rihito Kuroda, Yasuyuki Shirai, Shigetoshi Sugawa (Tohoku Univ.) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
A proximity capacitance sensor for measuring small capacitance differences was designed and fabricated using 0.18 μm CMOS technology. Measurements of the prototype sensors were performed, and good linearity over a wide capacitance range in the input-output characteristics and low noise measurement by noise cancelling operation were achieved .The optimal system parameters for measuring small capacitance differences with high accuracy were investigated, and it was found that when the measurement capacitance value is close to the detection electrode parasitic capacitance value, -higher sensitivity is obtained toward measurement of small capacitance difference measurement. Based on these results, small capacitance change measurements were performed and a detection of small capacitance changes of 1 % relative to the back-ground capacitance was confirmed. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
Proximity Capacitance / Sensor / High Precision / Small Capacitance Difference / Noise Cancelling / / / |
| Reference Info. |
ITE Tech. Rep., vol. 46, no. 23, IST2022-31, pp. 71-76, Aug. 2022. |
| Paper # |
IST2022-31 |
| Date of Issue |
2022-08-01 (IST) |
| ISSN |
Print edition: ISSN 1342-6893 Online edition: ISSN 2424-1970 |
| Download PDF |
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| Conference Information |
| Committee |
IEICE-ICD IEICE-SDM IST |
| Conference Date |
2022-08-08 - 2022-08-10 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
On-line |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Analog, Mixed Analog and Digital, RF, and Sensor Interface, Low Voltage/Low Power Techniques, Novel Devices/Circuits, and the Applications |
| Paper Information |
| Registration To |
IST |
| Conference Code |
2022-08-ICD-SDM-IST |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
High-precision small capacitance difference measurement using proximity capacitance sensor |
| Sub Title (in English) |
|
| Keyword(1) |
Proximity Capacitance |
| Keyword(2) |
Sensor |
| Keyword(3) |
High Precision |
| Keyword(4) |
Small Capacitance Difference |
| Keyword(5) |
Noise Cancelling |
| Keyword(6) |
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| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Yoshiaki Watanabe |
| 1st Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 2nd Author's Name |
Yuki Sugama |
| 2nd Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 3rd Author's Name |
Yoshinobu Shiba |
| 3rd Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 4th Author's Name |
Rihito Kuroda |
| 4th Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 5th Author's Name |
Yasuyuki Shirai |
| 5th Author's Affiliation |
Tohoku University (Tohoku Univ.) |
| 6th Author's Name |
Shigetoshi Sugawa |
| 6th Author's Affiliation |
Tohoku University (Tohoku Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2022-08-09 14:00:00 |
| Presentation Time |
25 minutes |
| Registration for |
IST |
| Paper # |
IST2022-31 |
| Volume (vol) |
vol.46 |
| Number (no) |
no.23 |
| Page |
pp.71-76 |
| #Pages |
6 |
| Date of Issue |
2022-08-01 (IST) |